Membership
Tour
Register
Log in
Yinzhang GUO
Follow
Person
Shanghai, CN
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Lithography projection objective
Patent number
11,899,181
Issue date
Feb 13, 2024
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yinzhang Guo
G02 - OPTICS
Information
Patent Grant
Projection objective
Patent number
10,983,442
Issue date
Apr 20, 2021
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Fuping An
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHY PROJECTION OBJECTIVE
Publication number
20220075159
Publication date
Mar 10, 2022
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Yinzhang GUO
G02 - OPTICS
Information
Patent Application
PROJECTION OBJECTIVE
Publication number
20200310256
Publication date
Oct 1, 2020
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
Fuping AN
G02 - OPTICS