Yiping Song

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Yatton, GB

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Patents Grantslast 30 patents

Information Patent Grant
Electrostatic clamping method and apparatus
- Patent number 9,793,149
- Issue date Oct 17, 2017
- Oxford Instruments Nanotechnology Tools Limited
- Yiping Song
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CLAMPING METHOD AND APPARATUS
- Publication number 20150162234
- Publication date Jun 11, 2015
- Oxford Instruments Nanotechnology Tools Limited
- Yiping Song
- H01 - BASIC ELECTRIC ELEMENTS