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Yiqiong Wang
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San Marino, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method of micromachining a multi-part cavity
Patent number
6,827,869
Issue date
Dec 7, 2004
Dragan Podlesnik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for etching conductors at high etch rates
Patent number
6,593,244
Issue date
Jul 15, 2003
Applied Materials Inc.
Yiqiong Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Silicon trench etch using silicon-containing precursors to reduce o...
Patent number
6,380,095
Issue date
Apr 30, 2002
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etch process for forming high aspect ratio trenched in silicon
Patent number
6,127,278
Issue date
Oct 3, 2000
Applied Materials, Inc.
Yiqiong Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Method of eliminating notching when anisotropically etching small l...
Publication number
20030003748
Publication date
Jan 2, 2003
Anisul Khan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of micromachining a multi-part cavity
Publication number
20020185469
Publication date
Dec 12, 2002
Applied Materials, Inc.
Dragan Podlesnik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of etching high aspect ratio openings in silicon
Publication number
20010045354
Publication date
Nov 29, 2001
Yiqiong Wang
H01 - BASIC ELECTRIC ELEMENTS