Yixi TIAN

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Santa Clara, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Measurement of flatness of a susceptor of a display CVD chamber
- Patent number 10,763,154
- Issue date Sep 1, 2020
- Applied Materials, Inc.
- Ying Ma
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT OF FLATNESS OF A SUSCEPTOR OF A DISPLAY CVD CHAMBER
- Publication number 20200071823
- Publication date Mar 5, 2020
- Applied Materials, Inc.
- Ying MA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...