Yixiang Wang

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
- Patent number 12,125,669
- Issue date Oct 22, 2024
- ASML Netherlands B.V.
- Ning Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 12,087,542
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus and method
- Patent number 12,072,181
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Yan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, apparatus, and system for wafer grounding
- Patent number 12,051,562
- Issue date Jul 30, 2024
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 12,028,000
- Issue date Jul 2, 2024
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 11,929,232
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of inspecting samples with multiple beams of charged particles
- Patent number 11,815,473
- Issue date Nov 14, 2023
- ASML Netherlands B.V.
- Kuo-Feng Tseng
- G01 - MEASURING TESTING
Information Patent Grant
Optical objective lens
- Patent number 11,808,930
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Jian Zhang
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Thermal-aided inspection by advanced charge controller module in a...
- Patent number 11,728,131
- Issue date Aug 15, 2023
- ASML Netherlands B.V.
- Ning Ye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system with compensation lens
- Patent number 11,682,538
- Issue date Jun 20, 2023
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object table comprising an electrostatic clamp
- Patent number 11,637,512
- Issue date Apr 25, 2023
- ASML Netherlands B.V.
- Jan-Gerard Cornelis Van Der Toorn
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Systems and methods for etching a substrate
- Patent number 11,581,161
- Issue date Feb 14, 2023
- ASML Netherlands, B.V.
- Jie Fang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Current source apparatus and method
- Patent number 11,562,884
- Issue date Jan 24, 2023
- ASML Netherlands B.V.
- Yixiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical height detection system
- Patent number 11,521,826
- Issue date Dec 6, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for an advanced charged controller for wafer i...
- Patent number 11,482,399
- Issue date Oct 25, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical system with compensation lens
- Patent number 11,183,360
- Issue date Nov 23, 2021
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image contrast enhancement in sample inspection
- Patent number 11,164,719
- Issue date Nov 2, 2021
- ASML Netherlands B.V.
- Yixiang Wang
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 10,784,077
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 9,177,758
- Issue date Nov 3, 2015
- Hermes Microvision Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS OF INSPECTING SAMPLES WITH A BEAM OF CHARGED PARTICLES
- Publication number 20240044820
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Kuo-Feng TSENG
- G01 - MEASURING TESTING
Information Patent Application
THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...
- Publication number 20230395352
- Publication date Dec 7, 2023
- ASML NETHERLANDS B.V.
- Ning YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...
- Publication number 20230335374
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20230246568
- Publication date Aug 3, 2023
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...
- Publication number 20230178406
- Publication date Jun 8, 2023
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEVELING SENSOR IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20230096657
- Publication date Mar 30, 2023
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR INSPECTING AND GROUNDING A MASK IN A CHARGED PARTICLE SY...
- Publication number 20230005698
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Tianming CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE INSPECTION SYSTEM AND METHOD USING MULTI-WAVELENGT...
- Publication number 20220375715
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM MANIPULATION OF ADVANCED CHARGE CONTROLLER MODULE IN A CHARGED...
- Publication number 20220351932
- Publication date Nov 3, 2022
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...
- Publication number 20220328283
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Jinmei YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING
- Publication number 20220277926
- Publication date Sep 1, 2022
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...
- Publication number 20220189733
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Ning YE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION
- Publication number 20220122803
- Publication date Apr 21, 2022
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION APPARATUS AND METHOD
- Publication number 20220107176
- Publication date Apr 7, 2022
- ASML NETHERLANDS B.V.
- Yan WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SYSTEM WITH COMPENSATION LENS
- Publication number 20220084780
- Publication date Mar 17, 2022
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-SOURCE ILLUMINATION UNIT AND METHOD OF OPERATING THE SAME
- Publication number 20210396683
- Publication date Dec 23, 2021
- ASML NETHERLANDS B.V.
- Jian ZHANG
- G01 - MEASURING TESTING
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20210313908
- Publication date Oct 7, 2021
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20210142979
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CURRENT SOURCE APPARATUS AND METHOD
- Publication number 20200335298
- Publication date Oct 22, 2020
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SYSTEM WITH COMPENSATION LENS
- Publication number 20200294762
- Publication date Sep 17, 2020
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEIGHT DETECTION SYSTEM
- Publication number 20200279715
- Publication date Sep 3, 2020
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL OBJECTIVE LENS
- Publication number 20200278524
- Publication date Sep 3, 2020
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR AN ADVANCED CHARGED CONTROLLER FOR WAFER I...
- Publication number 20200273662
- Publication date Aug 27, 2020
- ASML Netherlands B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF INSPECTING SAMPLES WITH MULTIPLE BEAMS OF CHARGED PARTICLES
- Publication number 20200271598
- Publication date Aug 27, 2020
- ASML NETHERLANDS B.V.
- Kuo-Feng TSENG
- G01 - MEASURING TESTING
Information Patent Application
IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION
- Publication number 20200234915
- Publication date Jul 23, 2020
- ASML NETHERLANDS B.V.
- Yixiang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR ETCHING A SUBSTRATE
- Publication number 20200211817
- Publication date Jul 2, 2020
- ASML NETHERLANDS B.V.
- Jie FANG
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20190043691
- Publication date Feb 7, 2019
- HERMES MICROVISION, INC.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20150144788
- Publication date May 28, 2015
- HERMES MICROVISION INC.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS

Yixiang Wang

Person

Patents Grantslast 30 patents

Thermal-aided inspection by advanced charge controller module in a...

Image contrast enhancement in sample inspection

Inspection apparatus and method

Method, apparatus, and system for wafer grounding

Object table comprising an electrostatic clamp

Systems and methods for charged particle flooding to enhance voltag...

Methods of inspecting samples with multiple beams of charged particles

Optical objective lens

Thermal-aided inspection by advanced charge controller module in a...

Optical system with compensation lens

Object table comprising an electrostatic clamp

Systems and methods for etching a substrate

Current source apparatus and method

Optical height detection system

Method and apparatus for an advanced charged controller for wafer i...

Optical system with compensation lens

Image contrast enhancement in sample inspection

Systems and methods for charged particle flooding to enhance voltag...

Charged particle beam apparatus

Patents Applicationslast 30 patents

METHODS OF INSPECTING SAMPLES WITH A BEAM OF CHARGED PARTICLES

THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

METHOD, APPARATUS, AND SYSTEM FOR DYNAMICALLY CONTROLLING AN ELECTR...

LEVELING SENSOR IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

SYSTEM FOR INSPECTING AND GROUNDING A MASK IN A CHARGED PARTICLE SY...

CHARGED PARTICLE INSPECTION SYSTEM AND METHOD USING MULTI-WAVELENGT...

BEAM MANIPULATION OF ADVANCED CHARGE CONTROLLER MODULE IN A CHARGED...

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...

METHOD, APPARATUS, AND SYSTEM FOR WAFER GROUNDING

THERMAL-AIDED INSPECTION BY ADVANCED CHARGE CONTROLLER MODULE IN A...

IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION

INSPECTION APPARATUS AND METHOD

OPTICAL SYSTEM WITH COMPENSATION LENS

MULTI-SOURCE ILLUMINATION UNIT AND METHOD OF OPERATING THE SAME

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

CURRENT SOURCE APPARATUS AND METHOD

OPTICAL SYSTEM WITH COMPENSATION LENS

OPTICAL HEIGHT DETECTION SYSTEM

OPTICAL OBJECTIVE LENS

METHOD AND APPARATUS FOR AN ADVANCED CHARGED CONTROLLER FOR WAFER I...

METHODS OF INSPECTING SAMPLES WITH MULTIPLE BEAMS OF CHARGED PARTICLES

IMAGE CONTRAST ENHANCEMENT IN SAMPLE INSPECTION

SYSTEMS AND METHODS FOR ETCHING A SUBSTRATE

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

Charged Particle Beam Apparatus