Yo ABE

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Patents Grantslast 30 patents

Information Patent Grant
Thermal processing apparatus, thermal processing method, and storag...
- Patent number 8,565,911
- Issue date Oct 22, 2013
- Tokyo Electron Limited
- Yo Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing apparatus, thermal processing method, and storag...
- Patent number 8,423,175
- Issue date Apr 16, 2013
- Tokyo Electron Limited
- Yo Abe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and storag...
- Patent number 8,029,224
- Issue date Oct 4, 2011
- Tokyo Electron Limited
- Yo Abe
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND STORAG...
- Publication number 20130204425
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Yo ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL PROCESSING APPARATUS, THERMAL PROCESSING METHOD, AND STORAG...
- Publication number 20100057249
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- Yo ABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate transfer apparatus, substrate transfer method, and storag...
- Publication number 20080232937
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMITED
- Yo Abe
- H01 - BASIC ELECTRIC ELEMENTS