Yo-han Ahn

Person

Seoul, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Photomask cleaning apparatus and methods of cleaning a photomask us...
- Patent number 8,585,391
- Issue date Nov 19, 2013
- Samsung Electronics Co., Ltd.
- Jin-Ho Kim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Contamination analysis unit and method thereof, and reticle cleanin...
- Patent number 8,146,447
- Issue date Apr 3, 2012
- Samsung Electronics Co., Ltd.
- Ok-Sun Lee
- G01 - MEASURING TESTING
Information Patent Grant
Substrate treating apparatus and exposing apparatus for cleaning a...
- Patent number 8,027,017
- Issue date Sep 27, 2011
- Samsung Electronics Co., Ltd.
- Ju-A Ryu
- B08 - CLEANING
Information Patent Grant
Air filtering device and cleaning system of semiconductor manufactu...
- Patent number 7,914,594
- Issue date Mar 29, 2011
- Samsung Electronics Co., Ltd.
- Chang-Min Cho
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Heat treatment equipment
- Patent number 7,850,449
- Issue date Dec 14, 2010
- Samsung Electronics Co., Ltd.
- Jae-Hyun Yang
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Contamination control system and air-conditioning system of a subst...
- Patent number 7,326,284
- Issue date Feb 5, 2008
- Samsung Electronics Co., Ltd.
- Tae-Jin Hwang
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Apparatus and method for cleaning air
- Patent number 7,258,728
- Issue date Aug 21, 2007
- Samsung Electronics Co., Ltd.
- Chang-Su Lim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Photolithography system and method of monitoring the same
- Patent number 7,161,660
- Issue date Jan 9, 2007
- Samsung Electronics Co., Ltd.
- Yo-Han Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Module for transferring a substrate
- Patent number 7,065,898
- Issue date Jun 27, 2006
- Samsung Electronics Co., Ltd.
- Hyun-Joon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of processing substrate w...
- Patent number 6,996,453
- Issue date Feb 7, 2006
- Samsung Electronics Co., Ltd.
- Yo-Han Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-alignment system of exposure apparatus having wafer cooling mea...
- Patent number 6,737,206
- Issue date May 18, 2004
- Samsung Electronics Co., Ltd.
- Sang-kap Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pre-alignment system of exposure apparatus having wafer cooling mea...
- Patent number 6,613,487
- Issue date Sep 2, 2003
- Samsung Electronics Co., Ltd.
- Sang-kap Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Air shower head of photolithography equipment for directing air tow...
- Patent number 6,522,385
- Issue date Feb 18, 2003
- Samsung Electronics Co., Ltd.
- Yo-Han Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Chemical mechanical polishing apparatus and method of washing conta...
- Patent number 6,402,598
- Issue date Jun 11, 2002
- Samsung Electronics Co., Ltd.
- Yo-han Ahn
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for controlling the temperature of a wafer located at a p...
- Patent number 6,370,793
- Issue date Apr 16, 2002
- Samsung Electronics Co., Ltd.
- Hee Sun Chae
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Driving control system and monitoring device for fan filter unit in...
- Patent number 6,098,023
- Issue date Aug 1, 2000
- Samsung Electronics, Co., Ltd.
- Jung-sung Hwang
- F24 - HEATING RANGES VENTILATING
Information Patent Grant
Drive checking system for fan filter units in clean room
- Patent number 6,093,229
- Issue date Jul 25, 2000
- Samsung Electronics Co., Ltd.
- Kun-hyung Lee
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Apparatus for guiding air current in a wafer loading chamber for ch...
- Patent number 6,036,781
- Issue date Mar 14, 2000
- Samsung Electronics Co., Ltd.
- Yo-han Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Particle counter with sampling probe having adjustable intake area
- Patent number 5,856,623
- Issue date Jan 5, 1999
- Samsung Electronics Co., Ltd.
- Yo-han Ahn
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Photomask Cleaning Apparatus and Methods of Cleaning a Photomask Us...
- Publication number 20120219654
- Publication date Aug 30, 2012
- Jin-Ho Kim
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate treating apparatus, exposing apparatus and methods of cle...
- Publication number 20090180086
- Publication date Jul 16, 2009
- Samsung Electronics Co., Ltd.
- Ju-A Ryu
- B08 - CLEANING
Information Patent Application
AIR FILTERING DEVICE AND CLEANING SYSTEM OF SEMICONDUCTOR MANUFACTU...
- Publication number 20090025565
- Publication date Jan 29, 2009
- Samsung Electronics Co., Ltd.
- Chang-Min CHO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CONTAMINATION ANALYSIS UNIT AND METHOD THEREOF, AND RETICLE CLEANIN...
- Publication number 20080196515
- Publication date Aug 21, 2008
- SAMSUNG ELECTRONICS CO., LTD.
- Ok-Sun Lee
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for exposing substrate
- Publication number 20080137046
- Publication date Jun 12, 2008
- Samsung Electronics Co., Ltd.
- Ju-A Ryu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEAT TREATMENT EQUIPMENT
- Publication number 20080011735
- Publication date Jan 17, 2008
- Samsung Electronics Co., Ltd.
- Jae-Hyun YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for collecting contaminants from an air flow f...
- Publication number 20070039470
- Publication date Feb 22, 2007
- Ha-Na Kim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Exposure apparatus for manufacturing semiconductors and method for...
- Publication number 20070035715
- Publication date Feb 15, 2007
- SAMSUNG ELECTRONICS CO., LTD.
- Hyung-Seok Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of transferring a substrate
- Publication number 20060225299
- Publication date Oct 12, 2006
- Samsung Electronics Co., Ltd.
- Hyun-Joo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photolithography system and method of monitoring the same
- Publication number 20050134823
- Publication date Jun 23, 2005
- SAMSUNG ELECTRONICS CO., LTD.
- Yo-Han Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Device for cleaning reticle box
- Publication number 20050091781
- Publication date May 5, 2005
- SAMSUNG ELECTRONICS CO., LTD.
- Jae-Hyun Yang
- B08 - CLEANING
Information Patent Application
Apparatus and method for cleaning air
- Publication number 20050039600
- Publication date Feb 24, 2005
- Chang-Su Lim
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Contamination control system and air-conditioning system of a subst...
- Publication number 20050000243
- Publication date Jan 6, 2005
- Tae-Jin Hwang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Module for transferring a substrate
- Publication number 20040168742
- Publication date Sep 2, 2004
- Hyun-Joon Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for safely storing an object and apparatus having a storage...
- Publication number 20040159573
- Publication date Aug 19, 2004
- Chang-Su Lim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and method of processing substrate w...
- Publication number 20040105738
- Publication date Jun 3, 2004
- Yo-Han Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pre-alignment system of exposure apparatus having wafer cooling mea...
- Publication number 20030203295
- Publication date Oct 30, 2003
- Sang-Kap Kim
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Air shower head of photolithography equipment for directing air tow...
- Publication number 20010048510
- Publication date Dec 6, 2001
- Yo-Han Ahn
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Person

Patents Grantslast 30 patents

Photomask cleaning apparatus and methods of cleaning a photomask us...

Contamination analysis unit and method thereof, and reticle cleanin...

Substrate treating apparatus and exposing apparatus for cleaning a...

Air filtering device and cleaning system of semiconductor manufactu...

Heat treatment equipment

Contamination control system and air-conditioning system of a subst...

Apparatus and method for cleaning air

Photolithography system and method of monitoring the same

Module for transferring a substrate

Substrate processing apparatus and method of processing substrate w...

Pre-alignment system of exposure apparatus having wafer cooling mea...

Pre-alignment system of exposure apparatus having wafer cooling mea...

Air shower head of photolithography equipment for directing air tow...

Chemical mechanical polishing apparatus and method of washing conta...

Apparatus for controlling the temperature of a wafer located at a p...

Driving control system and monitoring device for fan filter unit in...

Drive checking system for fan filter units in clean room

Apparatus for guiding air current in a wafer loading chamber for ch...

Particle counter with sampling probe having adjustable intake area

Patents Applicationslast 30 patents

Photomask Cleaning Apparatus and Methods of Cleaning a Photomask Us...

Substrate treating apparatus, exposing apparatus and methods of cle...

AIR FILTERING DEVICE AND CLEANING SYSTEM OF SEMICONDUCTOR MANUFACTU...

CONTAMINATION ANALYSIS UNIT AND METHOD THEREOF, AND RETICLE CLEANIN...

Apparatus and method for exposing substrate

HEAT TREATMENT EQUIPMENT

Apparatus and method for collecting contaminants from an air flow f...

Exposure apparatus for manufacturing semiconductors and method for...

Method of transferring a substrate

Photolithography system and method of monitoring the same

Device for cleaning reticle box

Apparatus and method for cleaning air

Contamination control system and air-conditioning system of a subst...

Module for transferring a substrate

Method for safely storing an object and apparatus having a storage...

Substrate processing apparatus and method of processing substrate w...

Pre-alignment system of exposure apparatus having wafer cooling mea...

Air shower head of photolithography equipment for directing air tow...