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YOH TANAKA

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  • FUCHU-SHI, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
    • Publication number 20110089023
    • Publication date Apr 21, 2011
    • Canon ANELVA Corporation
    • YOH TANAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HOLDER AND SUBSTRATE TEMPERATURE CONTROL METHOD
    • Publication number 20110068084
    • Publication date Mar 24, 2011
    • Canon ANELVA Corporation
    • Yoshida Tatsuhiko
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HOLDER
    • Publication number 20100014208
    • Publication date Jan 21, 2010
    • CANON ANLEVA CORPORATION
    • Yoshida Tatsuhiko
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HOLDING APPARATUS
    • Publication number 20090283976
    • Publication date Nov 19, 2009
    • Canon ANELVA Corporation
    • Kazuaki Kaneko
    • H01 - BASIC ELECTRIC ELEMENTS