Yohei Eto

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Carrier device, work processing apparatus, control method of carrie...
- Patent number 11,380,559
- Issue date Jul 5, 2022
- Ebara Corporation
- Yohei Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for cleaning substrate and substrate cleaning method
- Patent number 11,094,548
- Issue date Aug 17, 2021
- Ebara Corporation
- Shinji Kajita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat exchanger for regulating surface temperature of a polishing pa...
- Patent number 10,589,398
- Issue date Mar 17, 2020
- Ebara Corporation
- Yohei Eto
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Substrate transfer hand
- Patent number 10,475,691
- Issue date Nov 12, 2019
- Ebara Corporation
- Toru Maruyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus and method for regulating surface temperature of polishin...
- Patent number 10,414,018
- Issue date Sep 17, 2019
- Ebara Corporation
- Toru Maruyama
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE PROCESSING DEVICE
- Publication number 20220402003
- Publication date Dec 22, 2022
- EBARA CORPORATION
- YOHEI ETO
- B08 - CLEANING
Information Patent Application
CARRIER DEVICE, WORK PROCESSING APPARATUS, CONTROL METHOD OF CARRIE...
- Publication number 20200328096
- Publication date Oct 15, 2020
- EBARA CORPORATION
- Yohei ETO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20190164769
- Publication date May 30, 2019
- EBARA CORPORATION
- Shinji KAJITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT EXCHANGER FOR REGULATING SURFACE TEMPERATURE OF A POLISHING PA...
- Publication number 20180236631
- Publication date Aug 23, 2018
- EBARA CORPORATION
- Yohei Eto
- B24 - GRINDING POLISHING
Information Patent Application
APPARATUS AND METHOD FOR REGULATING SURFACE TEMPERATURE OF POLISHIN...
- Publication number 20170239778
- Publication date Aug 24, 2017
- EBARA CORPORATION
- Toru MARUYAMA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSFER HAND
- Publication number 20160264365
- Publication date Sep 15, 2016
- EBARA CORPORATION
- Toru Maruyama
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS