Yohei ISHIDA

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus
- Patent number 11,887,816
- Issue date Jan 30, 2024
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave output device and plasma processing apparatus
- Patent number 11,587,769
- Issue date Feb 21, 2023
- Tokyo Electron Limited
- Yohei Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,527,386
- Issue date Dec 13, 2022
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining correction function
- Patent number 11,249,126
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Kazushi Kaneko
- G01 - MEASURING TESTING
Information Patent Grant
Method of determining correction function
- Patent number 11,209,515
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave output device and plasma processing apparatus
- Patent number 10,971,337
- Issue date Apr 6, 2021
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection device, microwave output device and plasma processing app...
- Patent number 10,796,886
- Issue date Oct 6, 2020
- Tokyo Electron Limited
- Kazushi Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus, abnormality determination method, and...
- Patent number 10,662,531
- Issue date May 26, 2020
- Tokyo Electron Limited
- Kazushi Kaneko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma processing apparatus and microwave supply method
- Patent number 9,241,397
- Issue date Jan 19, 2016
- Tokyo Electron Limited
- Kazushi Kaneko
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS, ANALYSIS APPARATUS, AND STORAGE MEDIUM
- Publication number 20250006464
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220130643
- Publication date Apr 28, 2022
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APPARATUS
- Publication number 20220028661
- Publication date Jan 27, 2022
- TOKYO ELECTRON LIMITED
- Yohei Ishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210280390
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETERMINING CORRECTION FUNCTION
- Publication number 20200341043
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHOD OF DETERMINING CORRECTION FUNCTION
- Publication number 20200341106
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- G01 - MEASURING TESTING
Information Patent Application
DETECTION DEVICE, MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APP...
- Publication number 20200035462
- Publication date Jan 30, 2020
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microwave output device and plasma processing apparatus
- Publication number 20190057844
- Publication date Feb 21, 2019
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180277339
- Publication date Sep 27, 2018
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, ABNORMALITY DETERMINATION METHOD, AND...
- Publication number 20150194292
- Publication date Jul 9, 2015
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE SUPPLY METHOD
- Publication number 20150108897
- Publication date Apr 23, 2015
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Yohei ISHIDA

Person

Patents Grantslast 30 patents

Plasma processing apparatus

Microwave output device and plasma processing apparatus

Plasma processing apparatus

Method of determining correction function

Method of determining correction function

Microwave output device and plasma processing apparatus

Detection device, microwave output device and plasma processing app...

Plasma processing apparatus, abnormality determination method, and...

Microwave plasma processing apparatus and microwave supply method

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS, ANALYSIS APPARATUS, AND STORAGE MEDIUM

PLASMA PROCESSING APPARATUS

MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

METHOD OF DETERMINING CORRECTION FUNCTION

METHOD OF DETERMINING CORRECTION FUNCTION

DETECTION DEVICE, MICROWAVE OUTPUT DEVICE AND PLASMA PROCESSING APP...

Microwave output device and plasma processing apparatus

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS, ABNORMALITY DETERMINATION METHOD, AND...

MICROWAVE PLASMA PROCESSING APPARATUS AND MICROWAVE SUPPLY METHOD