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Yohei Kawase
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Sakura-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Methods for high temperature etching a high-K material gate structure
Patent number
8,501,626
Issue date
Aug 6, 2013
Applied Materials, Inc.
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of patterning lead zirconium titanate and barium strontium t...
Patent number
6,436,838
Issue date
Aug 20, 2002
Applied Materials, Inc.
Chen Tsan Ying
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHODS FOR HIGH TEMPERATURE ETCHING A HIGH-K GATE STRUCTURE
Publication number
20130344701
Publication date
Dec 26, 2013
Wei LIU
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHODS FOR HIGH TEMPERATURE ETCHING A HIGH-K MATERIAL GATE STRUCTURE
Publication number
20090004870
Publication date
Jan 1, 2009
Wei Liu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Method of etching conductive layers for capacitor and semiconductor...
Publication number
20030077843
Publication date
Apr 24, 2003
APPLIED MATERIALS, INC.
Hideyuki Yamauchi
H01 - BASIC ELECTRIC ELEMENTS