Yohei MIDORIKAWA

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Yamanashi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 11,572,623
- Issue date Feb 7, 2023
- Tokyo Electron Limited
- Yohei Midorikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,490,151
- Issue date Nov 8, 2016
- Tokyo Electron Limited
- Yuji Asakawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEATING/COOLING DEVICE AND HEATING/COOLING METHOD
- Publication number 20220336238
- Publication date Oct 20, 2022
- Tokyo Electron Limited
- Shosuke ENDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180096866
- Publication date Apr 5, 2018
- TOKYO ELECTRON LIMITED
- Yohei MIDORIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160027672
- Publication date Jan 28, 2016
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS