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Yohei NAKAGOMI
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Nirasaki City, Yamanashi, JP
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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20240249956
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Yohei NAKAGOMI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
HEATING/COOLING DEVICE AND HEATING/COOLING METHOD
Publication number
20220336238
Publication date
Oct 20, 2022
Tokyo Electron Limited
Shosuke ENDO
H01 - BASIC ELECTRIC ELEMENTS