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Yohei Ogawa

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Patents Grantslast 30 patents

  • Information Patent Grant

    Thin film formation method
    • Patent number 11,189,482
    • Issue date Nov 30, 2021
    • Ulvac, Inc.
    • Masanobu Hatanaka
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    THIN FILM FORMATION METHOD
    • Publication number 20190355576
    • Publication date Nov 21, 2019
    • Ulvac, Inc.
    • Masanobu HATANAKA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS AND METHOD FOR CLEANING FILM-FORMING APPARATUS
    • Publication number 20130239993
    • Publication date Sep 19, 2013
    • ULVAC, Inc.
    • Yohei Ogawa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...