Yohei SANO

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Heat treatment device and treatment method
- Patent number 11,978,630
- Issue date May 7, 2024
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment device and treatment method
- Patent number 11,469,105
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,036,140
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus, substrate processing method and com...
- Patent number 10,955,743
- Issue date Mar 23, 2021
- Tokyo Electron Limited
- Hiroshi Mizunoura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment method and thermal treatment apparatus
- Patent number 10,656,526
- Issue date May 19, 2020
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
HEAT TREATMENT DEVICE AND TREATMENT METHOD
- Publication number 20240249940
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Yohei SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD
- Publication number 20230176484
- Publication date Jun 8, 2023
- Tokyo Electron Limited
- Shinichiro KAWAKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT DEVICE AND TREATMENT METHOD
- Publication number 20230020235
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Yohei SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT DEVICE AND TREATMENT METHOD
- Publication number 20210028008
- Publication date Jan 28, 2021
- TOKYO ELECTRON LIMITED
- Yohei SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...
- Publication number 20200233308
- Publication date Jul 23, 2020
- TOKYO ELECTRON LIMITED
- Shinichiro Kawakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...
- Publication number 20190317407
- Publication date Oct 17, 2019
- TOKYO ELECTRON LIMITED
- Hiroshi MIZUNOURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS
- Publication number 20180164689
- Publication date Jun 14, 2018
- TOKYO ELECTRON LIMITED
- Yohei SANO
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Heat treatment device and treatment method

Heat treatment device and treatment method

Substrate processing apparatus, substrate processing method and rec...

Substrate processing apparatus, substrate processing method and com...

Substrate treatment method and thermal treatment apparatus

Patents Applicationslast 30 patents

HEAT TREATMENT DEVICE AND TREATMENT METHOD

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD

HEAT TREATMENT DEVICE AND TREATMENT METHOD

HEAT TREATMENT DEVICE AND TREATMENT METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND REC...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND COM...

SUBSTRATE TREATMENT METHOD AND THERMAL TREATMENT APPARATUS