Yohei Sawada

Person

Osaka, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid control system and flow rate measurement method
- Patent number 11,460,869
- Issue date Oct 4, 2022
- Fujikin Incorporated
- Satoru Yamashita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Valve device and fluid control device
- Patent number 11,339,881
- Issue date May 24, 2022
- Fujikin Incorporated
- Kazunari Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow rate measuring method and flow rate measuring device
- Patent number 11,326,921
- Issue date May 10, 2022
- Fujikin Incorporated
- Masaaki Nagase
- G05 - CONTROLLING REGULATING
Information Patent Grant
Flow rate control device and abnormality detection method using flo...
- Patent number 11,313,756
- Issue date Apr 26, 2022
- FUTIKIN INCORPORATED
- Masaaki Nagase
- G01 - MEASURING TESTING
Information Patent Grant
Fluid control device, method for controlling fluid control device,...
- Patent number 11,137,779
- Issue date Oct 5, 2021
- Fujikin Incorporated
- Kaoru Hirata
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Flow rate control device, method of calibrating flow rate of flow r...
- Patent number 10,969,259
- Issue date Apr 6, 2021
- Fujikin Incorporated
- Yohei Sawada
- G01 - MEASURING TESTING
Information Patent Grant
Pressure-type flow rate control device and flow rate self-diagnosis...
- Patent number 10,928,813
- Issue date Feb 23, 2021
- Fujikin Incorporated
- Masaaki Nagase
- G05 - CONTROLLING REGULATING
Information Patent Grant
Gas supply device capable of measuring flow rate, flowmeter, and fl...
- Patent number 10,895,484
- Issue date Jan 19, 2021
- Fujikin Incorporated
- Yohei Sawada
- G05 - CONTROLLING REGULATING
Information Patent Grant
Method of determining flow rate of a gas in a substrate processing...
- Patent number 10,876,870
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Risako Miyoshi
- G01 - MEASURING TESTING
Information Patent Grant
Gas supply system, substrate processing system and gas supply method
- Patent number 10,665,430
- Issue date May 26, 2020
- Tokyo Electron Limited
- Atsushi Sawachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Valve with built-in orifice, and pressure-type flow rate control de...
- Patent number 10,648,572
- Issue date May 12, 2020
- Fujikin Incorporated
- Yohei Sawada
- G05 - CONTROLLING REGULATING
Information Patent Grant
Calibration method and flow rate measurement method for flow rate c...
- Patent number 9,638,560
- Issue date May 2, 2017
- Fujikin Incorporated
- Masaaki Nagase
- G05 - CONTROLLING REGULATING
Information Patent Grant
Variable orifice type pressure-controlled flow controller
- Patent number 9,507,352
- Issue date Nov 29, 2016
- Fujikin Incorporated
- Ryousuke Dohi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus for dividing and supplying gas and method for dividing an...
- Patent number 9,477,232
- Issue date Oct 25, 2016
- Fujikin Incorporated
- Eiji Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Apparatus for dividing and supplying gas and method for dividing an...
- Patent number 9,261,884
- Issue date Feb 16, 2016
- Fujikin Incorporated
- Yohei Sawada
- G05 - CONTROLLING REGULATING
Information Patent Grant
Flow rate measurement device and flow rate measurement method for f...
- Patent number 9,163,969
- Issue date Oct 20, 2015
- Fujikin Incorporated
- Yohei Sawada
- G01 - MEASURING TESTING
Information Patent Grant
Opening degree detection device for automatically operated valve
- Patent number 9,038,663
- Issue date May 26, 2015
- Fujikin Incorporated
- Ryousuke Dohi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Cam control valve
- Patent number 8,833,730
- Issue date Sep 16, 2014
- Fujikin Incorporated
- Yohei Sawada
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Cam valve
- Patent number 8,561,966
- Issue date Oct 22, 2013
- Fujikin Incorporated
- Ryousuke Dohi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Flow rate ratio variable type fluid supply apparatus
- Patent number 8,555,920
- Issue date Oct 15, 2013
- Fujikin Incorporated
- Kaoru Hirata
- G05 - CONTROLLING REGULATING
Information Patent Grant
Piezoelectric driven control valve
- Patent number 8,162,286
- Issue date Apr 24, 2012
- Fujikin Incorporated
- Yohei Sawada
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Patents Applicationslast 30 patents

Information Patent Application
VALVE DEVICE AND FLUID CONTROL DEVICE
- Publication number 20200370664
- Publication date Nov 26, 2020
- Fujikin Incorporated
- Kazunari WATANABE
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
FLOW RATE CONTROL DEVICE AND ABNORMALITY DETECTION METHOD USING FLO...
- Publication number 20200232873
- Publication date Jul 23, 2020
- Fujikin Incorporated
- Masaaki NAGASE
- G05 - CONTROLLING REGULATING
Information Patent Application
Fluid Control System and Flow Rate Measurement Method
- Publication number 20200159257
- Publication date May 21, 2020
- Fujikin Incorporated
- Satoru YAMASHITA
- G05 - CONTROLLING REGULATING
Information Patent Application
FLOW RATE MEASURING METHOD AND FLOW RATE MEASURING DEVICE
- Publication number 20200011720
- Publication date Jan 9, 2020
- Fujikin Incorporated
- Masaaki NAGASE
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF DETERMINING FLOW RATE OF GAS
- Publication number 20190212176
- Publication date Jul 11, 2019
- TOKYO ELECTRON LIMITED
- Risako MIYOSHI
- G01 - MEASURING TESTING
Information Patent Application
VALVE WITH BUILT-IN ORIFICE, AND PRESSURE-TYPE FLOW RATE CONTROL DE...
- Publication number 20190178389
- Publication date Jun 13, 2019
- Fujikin Incorporated
- Yohei SAWADA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
FLOW RATE CONTROL DEVICE, METHOD OF CALIBRATING FLOW RATE OF FLOW R...
- Publication number 20190137309
- Publication date May 9, 2019
- Fujikin Incorporated
- Yohei SAWADA
- G01 - MEASURING TESTING
Information Patent Application
FLUID CONTROL DEVICE, METHOD FOR CONTROLLING FLUID CONTROL DEVICE,...
- Publication number 20190129452
- Publication date May 2, 2019
- Fujikin Incorporated
- Kaoru HIRATA
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PRESSURE-TYPE FLOW RATE CONTROL DEVICE AND FLOW RATE SELF-DIAGNOSIS...
- Publication number 20190094847
- Publication date Mar 28, 2019
- Fujikin Incorporated
- Masaaki NAGASE
- G05 - CONTROLLING REGULATING
Information Patent Application
GAS SUPPLY DEVICE CAPABLE OF MEASURING FLOW RATE, FLOWMETER, AND FL...
- Publication number 20190017855
- Publication date Jan 17, 2019
- Fujikin Incorporated
- Yohei SAWADA
- G01 - MEASURING TESTING
Information Patent Application
GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING SYSTEM AND GAS SUPPLY METHOD
- Publication number 20180012735
- Publication date Jan 11, 2018
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE ORIFICE TYPE PRESSURE-CONTROLLED FLOW CONTROLLER
- Publication number 20150114499
- Publication date Apr 30, 2015
- Fujikin Incorporated
- Ryousuke Dohi
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
APPARATUS FOR DIVIDING AND SUPPLYING GAS AND METHOD FOR DIVIDING AN...
- Publication number 20150059859
- Publication date Mar 5, 2015
- Fujikin Incorporated
- Eiji Takahashi
- G05 - CONTROLLING REGULATING
Information Patent Application
FLOW RATE MEASUREMENT DEVICE AND FLOW RATE MEASUREMENT METHOD FOR F...
- Publication number 20140013838
- Publication date Jan 16, 2014
- Fujikin Incorporated
- Yohei Sawada
- G01 - MEASURING TESTING
Information Patent Application
OPENING DEGREE DETECTION DEVICE FOR AUTOMATICALLY OPERATED VALVE
- Publication number 20130319551
- Publication date Dec 5, 2013
- FUJIKIN INCORPORATED
- Ryousuke Dohi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
APPARATUS FOR DIVIDING AND SUPPLYING GAS AND METHOD FOR DIVIDING AN...
- Publication number 20130220433
- Publication date Aug 29, 2013
- Fujikin Incorporated
- Yohei Sawada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
CALIBRATION METHOD AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE C...
- Publication number 20130186471
- Publication date Jul 25, 2013
- Fujikin Incorporated
- Masaaki Nagase
- G01 - MEASURING TESTING
Information Patent Application
CAM CONTROL VALVE
- Publication number 20120223265
- Publication date Sep 6, 2012
- Fujikin Incorporated
- Yohei Sawada
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
FLOW RATE RATIO VARIABLE TYPE FLUID SUPPLY APPARATUS
- Publication number 20100229976
- Publication date Sep 16, 2010
- Fujikin Incorporated
- Kaoru Hirata
- G05 - CONTROLLING REGULATING
Information Patent Application
PIEZOELECTRIC DRIVEN CONTROL VALVE
- Publication number 20100127196
- Publication date May 27, 2010
- Fujikin Incorporated
- Yohei Sawada
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...

Yohei Sawada

Person

Patents Grantslast 30 patents

Fluid control system and flow rate measurement method

Valve device and fluid control device

Flow rate measuring method and flow rate measuring device

Flow rate control device and abnormality detection method using flo...

Fluid control device, method for controlling fluid control device,...

Flow rate control device, method of calibrating flow rate of flow r...

Pressure-type flow rate control device and flow rate self-diagnosis...

Gas supply device capable of measuring flow rate, flowmeter, and fl...

Method of determining flow rate of a gas in a substrate processing...

Gas supply system, substrate processing system and gas supply method

Valve with built-in orifice, and pressure-type flow rate control de...

Calibration method and flow rate measurement method for flow rate c...

Variable orifice type pressure-controlled flow controller

Apparatus for dividing and supplying gas and method for dividing an...

Apparatus for dividing and supplying gas and method for dividing an...

Flow rate measurement device and flow rate measurement method for f...

Opening degree detection device for automatically operated valve

Cam control valve

Cam valve

Flow rate ratio variable type fluid supply apparatus

Piezoelectric driven control valve

Patents Applicationslast 30 patents

VALVE DEVICE AND FLUID CONTROL DEVICE

FLOW RATE CONTROL DEVICE AND ABNORMALITY DETECTION METHOD USING FLO...

Fluid Control System and Flow Rate Measurement Method

FLOW RATE MEASURING METHOD AND FLOW RATE MEASURING DEVICE

METHOD OF DETERMINING FLOW RATE OF GAS

VALVE WITH BUILT-IN ORIFICE, AND PRESSURE-TYPE FLOW RATE CONTROL DE...

FLOW RATE CONTROL DEVICE, METHOD OF CALIBRATING FLOW RATE OF FLOW R...

FLUID CONTROL DEVICE, METHOD FOR CONTROLLING FLUID CONTROL DEVICE,...

PRESSURE-TYPE FLOW RATE CONTROL DEVICE AND FLOW RATE SELF-DIAGNOSIS...

GAS SUPPLY DEVICE CAPABLE OF MEASURING FLOW RATE, FLOWMETER, AND FL...

GAS SUPPLY SYSTEM, SUBSTRATE PROCESSING SYSTEM AND GAS SUPPLY METHOD

VARIABLE ORIFICE TYPE PRESSURE-CONTROLLED FLOW CONTROLLER

APPARATUS FOR DIVIDING AND SUPPLYING GAS AND METHOD FOR DIVIDING AN...

FLOW RATE MEASUREMENT DEVICE AND FLOW RATE MEASUREMENT METHOD FOR F...

OPENING DEGREE DETECTION DEVICE FOR AUTOMATICALLY OPERATED VALVE

APPARATUS FOR DIVIDING AND SUPPLYING GAS AND METHOD FOR DIVIDING AN...

CALIBRATION METHOD AND FLOW RATE MEASUREMENT METHOD FOR FLOW RATE C...

CAM CONTROL VALVE

FLOW RATE RATIO VARIABLE TYPE FLUID SUPPLY APPARATUS

PIEZOELECTRIC DRIVEN CONTROL VALVE