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Yohei Uchida
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Shizuoka, JP
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last 30 patents
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Patent Grant
Thin-film forming method and thin-film forming apparatus
Patent number
9,145,605
Issue date
Sep 29, 2015
ULVAC, Inc.
Takeshi Masuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Manufacturing method and manufacturing apparatus of device
Patent number
8,883,632
Issue date
Nov 11, 2014
Ulvac, Inc.
Youhei Endo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
THIN-FILM FORMING METHOD AND THIN-FILM FORMING APPARATUS
Publication number
20130224381
Publication date
Aug 29, 2013
Ulvac, Inc.
Takeshi Masuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
THIN FILM FORMING METHOD AND THIN FILM FORMING APPARATUS
Publication number
20130216710
Publication date
Aug 22, 2013
Ulvac, Inc.
Takeshi Masuda
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF DEVICE
Publication number
20130178059
Publication date
Jul 11, 2013
ULVAC, Inc.
Youhei ENDO
H01 - BASIC ELECTRIC ELEMENTS