Yohei YAMAMOTO

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Yokkaichi Mie, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment device, substrate treatment method, and semicon...
- Patent number 11,342,182
- Issue date May 24, 2022
- Kioxia Corporation
- Yasuhito Yoshimizu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20220280969
- Publication date Sep 8, 2022
- KIOXIA Corporation
- Yurika KANNO
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT METHOD, AND SEMICON...
- Publication number 20200185221
- Publication date Jun 11, 2020
- Toshiba Memory Corporation
- Yasuhito YOSHIMIZU
- B08 - CLEANING