Yohei YAMAWAKI

Person

Kikuchi-gun, Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,142,483
- Issue date Nov 12, 2024
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,969,827
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Hayato Tanoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20240379370
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Yoshihiro KAWAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20230207344
- Publication date Jun 29, 2023
- TOKYO ELECTRON LIMITED
- Yohei YAMAWAKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEPARATING APPARATUS AND SEPARATING METHOD
- Publication number 20220266312
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Yohei YAMAWAKI
- B08 - CLEANING
Information Patent Application
SEPARATING APPARATUS AND SEPARATING METHOD
- Publication number 20220270895
- Publication date Aug 25, 2022
- TOKYO ELECTRON LIMITED
- Seiji NAKANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS AND PROCESSING METHOD
- Publication number 20220250190
- Publication date Aug 11, 2022
- TOKYO ELECTRON LIMITED
- Hayato TANOUE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20220234160
- Publication date Jul 28, 2022
- TOKYO ELECTRON LIMITED
- Yohei YAMAWAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210391177
- Publication date Dec 16, 2021
- TOKYO ELECTRON LIMITED
- Yoshihiro KAWAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS

Yohei YAMAWAKI

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Processing apparatus and processing method

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEPARATING APPARATUS AND SEPARATING METHOD

SEPARATING APPARATUS AND SEPARATING METHOD

PROCESSING APPARATUS AND PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD