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Yohsuke SHIBUYA

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  • Kawasaki-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20160247667
    • Publication date Aug 25, 2016
    • Canon ANELVA Corporation
    • Yohsuke Shibuya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTRONIC COMPONENT MANUFACTURING METHOD AND ELECTRODE STRUCTURE
    • Publication number 20140319676
    • Publication date Oct 30, 2014
    • Akira MATSUO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20130277213
    • Publication date Oct 24, 2013
    • Yohsuke SHIBUYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ELECTRONIC COMPONENT MANUFACTURING METHOD INCLUDING STEP OF EMBEDDI...
    • Publication number 20120161322
    • Publication date Jun 28, 2012
    • Canon ANELVA Corporation
    • Shunichi Wakayanagi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    MAGNETRON SPUTTERING APPARATUS AND ELECTRONIC COMPONENT MANUFACTURI...
    • Publication number 20120073960
    • Publication date Mar 29, 2012
    • Canon ANELVA Corporation
    • Yohsuke SHIBUYA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT DEVICE AND PLASMA PROCESSING APPARATUS
    • Publication number 20090308537
    • Publication date Dec 17, 2009
    • Canon ANELVA Corporation
    • Yohsuke Shibuya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE HOLDING APPARATUS
    • Publication number 20090283976
    • Publication date Nov 19, 2009
    • Canon ANELVA Corporation
    • Kazuaki Kaneko
    • H01 - BASIC ELECTRIC ELEMENTS