Yoichi Inoue

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Minato-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma process device and plasma process method
- Patent number 8,394,231
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma process device and plasma process method
- Publication number 20070131171
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma processing device and plasma processing method
- Publication number 20040127033
- Publication date Jul 1, 2004
- Koichi Takatsuki
- H01 - BASIC ELECTRIC ELEMENTS