Yoichi Isago

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Methods for cleaning a substrate
- Patent number 7,288,156
- Issue date Oct 30, 2007
- Lam Research Corporation
- Yoichi Isago
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus for cleaning a substrate
- Patent number 7,004,181
- Issue date Feb 28, 2006
- Lam Research Corporation
- Yoichi Isago
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
Methods for cleaning a substrate
- Publication number 20060112974
- Publication date Jun 1, 2006
- Yoichi Isago
- B08 - CLEANING
Information Patent Application
Water supply apparatus and method thereof
- Publication number 20030217762
- Publication date Nov 27, 2003
- LAM RESEARCH CORPORATION
- Naoaki Kobayashi
- B08 - CLEANING
Information Patent Application
Water supplying apparatus and water supplying method
- Publication number 20030041881
- Publication date Mar 6, 2003
- Yoichi Isago
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL