Yoichi Kurono

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Beverly, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Etching system and etching chamber
- Patent number 6,558,506
- Issue date May 6, 2003
- Tokyo Electron Limited
- Richard J. Freeman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for feeding gases for use in semiconductor manufacturing
- Patent number 6,360,762
- Issue date Mar 26, 2002
- Fujikin Incorporated
- Hirofumi Kitayama
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Apparatus for feeding gases for use in semiconductor manufacturing
- Patent number 6,210,482
- Issue date Apr 3, 2001
- Fujikin Incorporated
- Hirofumi Kitayama
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for feeding gases for use in semiconductor man...
- Publication number 20010013363
- Publication date Aug 16, 2001
- Hirofumi Kitayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...