Yoichi Nakagomi

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Patents Grantslast 30 patents

Information Patent Grant
Temperature managing apparatus for multi-stage container
- Patent number 6,239,602
- Issue date May 29, 2001
- Tokyo Electron Limited
- Yoichi Nakagomi
- G05 - CONTROLLING REGULATING
Information Patent Grant
Semiconductor wafer holder with spring-mounted temperature measurem...
- Patent number 6,084,215
- Issue date Jul 4, 2000
- Tokyo Electron Limited
- Kunihiro Furuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for probe testing substrate
- Patent number 5,742,173
- Issue date Apr 21, 1998
- Tokyo Electron Limited
- Yoichi Nakagomi
- G01 - MEASURING TESTING