Yoichi Tokunaga

Person

Kumamoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,437,252
- Issue date Sep 6, 2022
- Tokyo Electron Limited
- Hiromitsu Namba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,851,468
- Issue date Dec 1, 2020
- Tokyo Electron Limited
- Tadashi Iino
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 10,707,102
- Issue date Jul 7, 2020
- Tokyo Electron Limited
- Hiromitsu Namba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,859,136
- Issue date Jan 2, 2018
- Tokyo Electron Limited
- Hiromitsu Namba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method
- Patent number 9,716,002
- Issue date Jul 25, 2017
- Tokyo Electron Limited
- Yasushi Takiguchi
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and cleaning method, coater/developer and coatin...
- Patent number 9,120,120
- Issue date Sep 1, 2015
- Tokyo Electron Limited
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Cleaning apparatus and cleaning method, coater/developer and coatin...
- Patent number 8,851,092
- Issue date Oct 7, 2014
- Tokyo Electron Limited
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,828,183
- Issue date Sep 9, 2014
- Tokyo Electron Limited
- Hiromitsu Namba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Patent number 8,578,953
- Issue date Nov 12, 2013
- Tokyo Electron Limited
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200328095
- Publication date Oct 15, 2020
- TOKYO ELECTRON LIMITED
- Hiromitsu NAMBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20180108544
- Publication date Apr 19, 2018
- TOKYO ELECTRON LIMITED
- Hiromitsu NAMBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170283977
- Publication date Oct 5, 2017
- TOKYO ELECTRON LIMITED
- Tadashi IINO
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20160314958
- Publication date Oct 27, 2016
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, DEPOSIT REMOVING METHOD OF SUBSTRAT...
- Publication number 20150323250
- Publication date Nov 12, 2015
- TOKYO ELECTRON LIMITED
- Tsuyoshi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140374022
- Publication date Dec 25, 2014
- Hiromitsu Namba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...
- Publication number 20140352736
- Publication date Dec 4, 2014
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140251539
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Tsuyoshi Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...
- Publication number 20140102474
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130171831
- Publication date Jul 4, 2013
- TOKYO ELECTRON LIMITED
- Hiromitsu NAMBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...
- Publication number 20090202951
- Publication date Aug 13, 2009
- TOKYO ELECTRON LIMITED
- Taro Yamamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate cleaning apparatus, substrate cleaning method, and comput...
- Publication number 20080163899
- Publication date Jul 10, 2008
- Yasushi Takiguchi
- H01 - BASIC ELECTRIC ELEMENTS

Yoichi Tokunaga

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and substrate processing method

Substrate cleaning method

Cleaning apparatus and cleaning method, coater/developer and coatin...

Cleaning apparatus and cleaning method, coater/developer and coatin...

Substrate processing apparatus and substrate processing method

Substrate cleaning apparatus, substrate cleaning method, and comput...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

SUBSTRATE PROCESSING APPARATUS, DEPOSIT REMOVING METHOD OF SUBSTRAT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE CLEANING APPARATUS, SUBSTRATE CLEANING METHOD, AND COMPUT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CLEANING APPARATUS AND CLEANING METHOD, COATER/DEVELOPER AND COATIN...

Substrate cleaning apparatus, substrate cleaning method, and comput...