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Yoichiro Numazawa
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Machida-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing system
Patent number
6,376,796
Issue date
Apr 23, 2002
Anelva Corporation
Noriyoshi Sato
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Plasma processing system
Publication number
20010026575
Publication date
Oct 4, 2001
Noriyoshi Sato
H01 - BASIC ELECTRIC ELEMENTS