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Yoji Bito
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Toyama-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Plasma processing method and plasma processing device
Patent number
7,244,625
Issue date
Jul 17, 2007
Matsushita Electric Industrial Co., Ltd.
Katsuhiko Onishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for manufacturing semiconductor device
Patent number
5,989,929
Issue date
Nov 23, 1999
Matsushita Electronics Corporation
Hideo Nikoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor devices
Patent number
5,840,200
Issue date
Nov 24, 1998
Matsushita Electronics Corporation
Satoshi Nakagawa
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Plasma processing method and plasma processing device
Publication number
20050194354
Publication date
Sep 8, 2005
Matsushita Elec. Ind. Co., Ltd.
Katsuhiko Onishi
H01 - BASIC ELECTRIC ELEMENTS