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Yoji Ogawa
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Yokohama, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern forming method and pattern forming apparatus
Patent number
6,806,941
Issue date
Oct 19, 2004
Kabushiki Kaisha Toshiba
Soichi Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern forming method and pattern forming apparatus
Patent number
6,335,145
Issue date
Jan 1, 2002
Kabushiki Kaisha Toshiba
Soichi Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern forming method and pattern forming apparatus
Patent number
6,165,652
Issue date
Dec 26, 2000
Kabushiki Kaisha Toshiba
Soichi Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Pattern forming method
Patent number
6,040,114
Issue date
Mar 21, 2000
Kabushiki Kaisha Toshiba
Soichi Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photo mask and apparatus for repairing photo mask
Patent number
5,807,650
Issue date
Sep 15, 1998
Kabushiki Kaisha Toshiba
Haruki Komano
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Pattern forming method and pattern forming apparatus
Publication number
20020045132
Publication date
Apr 18, 2002
Soichi Inoue
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY