Yoji Sakata

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,971,661
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,984,905
- Issue date May 29, 2018
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,984,904
- Issue date May 29, 2018
- Tokyo Electron Limited
- Masahiro Nakaharada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate treatment system, substrate transfer method and computer...
- Patent number 9,460,942
- Issue date Oct 4, 2016
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment system, substrate transfer method, and a non-tr...
- Patent number 9,287,145
- Issue date Mar 15, 2016
- Tokyo Electron Limited
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...
- Publication number 20240355644
- Publication date Oct 24, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS
- Publication number 20240310740
- Publication date Sep 19, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240248417
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Yoji SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240231232
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210278768
- Publication date Sep 9, 2021
- TOKYO ELECTRON LIMITED
- Yoji Sakata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20160372346
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Masahiro NAKAHARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20160372345
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
- Publication number 20130112224
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...
- Publication number 20130112223
- Publication date May 9, 2013
- TOKYO ELECTRON LIMITED
- Masahiro Nakaharada
- H01 - BASIC ELECTRIC ELEMENTS

Yoji Sakata

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate treatment system, substrate transfer method and computer...

Substrate treatment system, substrate transfer method and computer...

Substrate treatment system, substrate transfer method and computer...

Substrate treatment system, substrate transfer method, and a non-tr...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS, AND SU...

SUBSTRATE TRANSFER METHOD AND SUBSTRATE TRANSFER APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...

SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...