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Koshi City, JP
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last 30 patents
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,971,661
Issue date
Apr 30, 2024
Tokyo Electron Limited
Yoji Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer method and computer...
Patent number
9,984,905
Issue date
May 29, 2018
Tokyo Electron Limited
Masahiro Nakaharada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system, substrate transfer method and computer...
Patent number
9,984,904
Issue date
May 29, 2018
Tokyo Electron Limited
Masahiro Nakaharada
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate treatment system, substrate transfer method and computer...
Patent number
9,460,942
Issue date
Oct 4, 2016
Tokyo Electron Limited
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment system, substrate transfer method, and a non-tr...
Patent number
9,287,145
Issue date
Mar 15, 2016
Tokyo Electron Limited
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240248417
Publication date
Jul 25, 2024
TOKYO ELECTRON LIMITED
Yoji SAKATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240231232
Publication date
Jul 11, 2024
TOKYO ELECTRON LIMITED
Yoji Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20210278768
Publication date
Sep 9, 2021
TOKYO ELECTRON LIMITED
Yoji Sakata
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
Publication number
20160372346
Publication date
Dec 22, 2016
TOKYO ELECTRON LIMITED
Masahiro NAKAHARADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
Publication number
20160372345
Publication date
Dec 22, 2016
TOKYO ELECTRON LIMITED
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD AND COMPUTER...
Publication number
20130112224
Publication date
May 9, 2013
TOKYO ELECTRON LIMITED
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEM, SUBSTRATE TRANSFER METHOD, AND A NON-TR...
Publication number
20130112223
Publication date
May 9, 2013
TOKYO ELECTRON LIMITED
Masahiro Nakaharada
H01 - BASIC ELECTRIC ELEMENTS