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Yoko Miyazaki
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Hachioji, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Appearance inspection apparatus and projection method for projectin...
Patent number
7,330,265
Issue date
Feb 12, 2008
Tokyo Seimitsu Co., Ltd.
Toshiro Kurosawa
G01 - MEASURING TESTING
Information
Patent Grant
Inspection analyzing apparatus and semiconductor device
Patent number
6,551,847
Issue date
Apr 22, 2003
Mitsubishi Denki Kabushiki Kaisha
Kyoko Asahina
G01 - MEASURING TESTING
Information
Patent Grant
Semiconductor inspection system, and method of manufacturing a semi...
Patent number
6,528,334
Issue date
Mar 4, 2003
Mitsubishi Denki Kabushiki Kaisha
Mariko Mizuo
G01 - MEASURING TESTING
Information
Patent Grant
Defect inspection apparatus
Patent number
6,437,862
Issue date
Aug 20, 2002
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G01 - MEASURING TESTING
Information
Patent Grant
Alignment method and semiconductor device
Patent number
6,400,038
Issue date
Jun 4, 2002
Mitsubishi Denki Kabushiki Kaisha
Toshiaki Mugibayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection apparatus for foreign matter and pattern defect
Patent number
6,344,897
Issue date
Feb 5, 2002
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G01 - MEASURING TESTING
Information
Patent Grant
Inspection apparatus for foreign matter and pattern defect
Patent number
6,295,126
Issue date
Sep 25, 2001
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G01 - MEASURING TESTING
Information
Patent Grant
Alignment method and semiconductor device
Patent number
6,242,318
Issue date
Jun 5, 2001
Mitsubishi Denki Kabushiki Kaisha
Toshiaki Mugibayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for inspecting pattern defect
Patent number
6,031,607
Issue date
Feb 29, 2000
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection data analyzing apparatus for in-line inspection with enh...
Patent number
6,016,562
Issue date
Jan 18, 2000
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G01 - MEASURING TESTING
Information
Patent Grant
Method of manufacturing a spatial frequency filter for use in a pat...
Patent number
5,379,150
Issue date
Jan 3, 1995
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern defect detection device and a spatial frequency filter used...
Patent number
5,289,260
Issue date
Feb 22, 1994
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection device for detecting defects in a periodic pattern on a...
Patent number
5,170,063
Issue date
Dec 8, 1992
Mitsubishi Denki Kabushiki Kaisha
Yoko Miyazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor Surface Inspection Apparatus and Method of Illumination
Publication number
20080024794
Publication date
Jan 31, 2008
Yoko Miyazaki
G01 - MEASURING TESTING
Information
Patent Application
Appearance inspection apparatus and projection method for projectin...
Publication number
20060007436
Publication date
Jan 12, 2006
Toshiro Kurosawa
G01 - MEASURING TESTING
Information
Patent Application
Inspection analyzing apparatus and semiconductor device
Publication number
20020081756
Publication date
Jun 27, 2002
Mitsubishi Denki Kabushiki Kaisha
Kyoko Asahina
G01 - MEASURING TESTING
Information
Patent Application
Inspection apparatus for foreign matter and pattern defect
Publication number
20010046044
Publication date
Nov 29, 2001
Mitsubishi Denki Kabushki Kaisha
Yoko Miyazaki
G01 - MEASURING TESTING
Information
Patent Application
Alignment method and semiconductor device
Publication number
20010010940
Publication date
Aug 2, 2001
Mitsubishi Denki Kabushiki Kaisha
Toshiaki Mugibayashi
H01 - BASIC ELECTRIC ELEMENTS