YOKO NAITO

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SAGAMIHARA-SHI, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method for cleaning plasma treatment device and plasma treatment sy...
- Patent number 6,443,165
- Issue date Sep 3, 2002
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming method and plasma film forming apparatus
- Patent number 6,355,902
- Issue date Mar 12, 2002
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment system and method
- Patent number 6,333,269
- Issue date Dec 25, 2001
- Tokyo Electron Limited
- Yoko Naito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method for producing the same
- Patent number 6,218,299
- Issue date Apr 17, 2001
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma film forming method and plasma film forming apparatus
- Patent number 6,215,087
- Issue date Apr 10, 2001
- Tokyo Electron Limited
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma film forming method and plasma film forming apparatus
- Publication number 20010020608
- Publication date Sep 13, 2001
- Takashi Akahori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT SYSTEM AND METHOD
- Publication number 20010008798
- Publication date Jul 19, 2001
- YOKO NAITO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...