Yoko ONO

Person

Yokohama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Feature analyzing apparatus for a surface of an object
- Patent number 8,700,498
- Issue date Apr 15, 2014
- Shibaura Mechatronics Corporation
- Yoshinori Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Substrate surface inspecting apparatus and substrate surface inspec...
- Patent number 8,508,246
- Issue date Aug 13, 2013
- Shibaura Mechatronics Corporation
- Hiroshi Wakaba
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method based on captured image and inspection device
- Patent number 8,497,985
- Issue date Jul 30, 2013
- Shibaura Mechatronics Corporation
- Yoshinori Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Inspection device for disk-shaped substrate
- Patent number 8,488,867
- Issue date Jul 16, 2013
- Shibaura Mechatronics Corporation
- Yoshinori Hayashi
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing device and baffle plate thereof
- Patent number 7,109,660
- Issue date Sep 19, 2006
- Tokyo Electron Limited
- Hiroyuki Ishihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
INSPECTION SYSTEM AND INSPECTION METHOD
- Publication number 20130169793
- Publication date Jul 4, 2013
- SHIBAURA MECHATRONICS CORPORATION
- Yoshinori HAYASHI
- G01 - MEASURING TESTING
Information Patent Application
ILLUMINATION SYSTEM, ILLUMINATION METHOD, AND INSPECTION SYSTEM
- Publication number 20130169795
- Publication date Jul 4, 2013
- SHIBAURA MECHATRONICS CORPORATION
- Yoshinori HAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FEATURE ANALYZING APPARATUS
- Publication number 20100310150
- Publication date Dec 9, 2010
- Yoshinori Hayashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE SURFACE INSPECTING APPARATUS AND SUBSTRATE SURFACE INSPEC...
- Publication number 20100310152
- Publication date Dec 9, 2010
- Shibaura Mechatronics Coporation
- Hiroshi Wakaba
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE FOR DISK-SHAPED SUBSTRATE
- Publication number 20100246934
- Publication date Sep 30, 2010
- Yoshinori Hayashi
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION METHOD BASED ON CAPTURED IMAGE AND INSPECTION DEVICE
- Publication number 20100245810
- Publication date Sep 30, 2010
- Yoshinori Hayashi
- G01 - MEASURING TESTING
Information Patent Application
Plasma processing device and baffle plate thereof
- Publication number 20050167052
- Publication date Aug 4, 2005
- TOKYO ELECTRON LIMITED
- Hiroyuki Ishihara
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Feature analyzing apparatus for a surface of an object

Substrate surface inspecting apparatus and substrate surface inspec...

Inspection method based on captured image and inspection device

Inspection device for disk-shaped substrate

Plasma processing device and baffle plate thereof

Patents Applicationslast 30 patents

INSPECTION SYSTEM AND INSPECTION METHOD

ILLUMINATION SYSTEM, ILLUMINATION METHOD, AND INSPECTION SYSTEM

FEATURE ANALYZING APPARATUS

SUBSTRATE SURFACE INSPECTING APPARATUS AND SUBSTRATE SURFACE INSPEC...

INSPECTION DEVICE FOR DISK-SHAPED SUBSTRATE

INSPECTION METHOD BASED ON CAPTURED IMAGE AND INSPECTION DEVICE

Plasma processing device and baffle plate thereof