Yoko Yamaguchi Adams

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Organic line width roughness with H2 plasma treatment
- Patent number 8,298,958
- Issue date Oct 30, 2012
- Lam Research Corporation
- Yoko Y. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual doped polysilicon and silicon germanium etch
- Patent number 7,682,985
- Issue date Mar 23, 2010
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Line end shortening reduction during etch
- Patent number 7,491,343
- Issue date Feb 17, 2009
- Lam Research Corporation
- Yoko Yamaguchi Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for the optimization of etch resistance in a...
- Patent number 7,316,785
- Issue date Jan 8, 2008
- Lam Research Corporation
- Yoko Yamaguchi Adams
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ORGANIC LINE WIDTH ROUGHNESS WITH H2 PLASMA TREATMENT
- Publication number 20130087284
- Publication date Apr 11, 2013
- LAM RESEARCH CORPORATION
- Yoko Y. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANIC LINE WIDTH ROUGHNESS WITH H2 PLASMA TREATMENT
- Publication number 20100015809
- Publication date Jan 21, 2010
- LAM RESEARCH CORPORATION
- Yoko Y. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINE END SHORTENING REDUCTION DURING ETCH
- Publication number 20080087639
- Publication date Apr 17, 2008
- Lam Research Corporation
- Yoko Yamaguchi Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for the optimization of etch resistance in a...
- Publication number 20060000797
- Publication date Jan 5, 2006
- Yoko Yamaguchi Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual doped polysilicon and silicon germanium etch
- Publication number 20050205862
- Publication date Sep 22, 2005
- Lam Research Corporation
- C. Robert Koemtzopoulos
- H01 - BASIC ELECTRIC ELEMENTS