Yoko Yamaguchi

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Directional deposition in etch chamber
- Patent number 11,742,212
- Issue date Aug 29, 2023
- Lam Research Corporation
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for determining field non-uniformities of a wafer...
- Patent number 10,763,142
- Issue date Sep 1, 2020
- Lam Research Corporation
- Marcus Musselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spacer profile control using atomic layer deposition in a multiple...
- Patent number 10,446,394
- Issue date Oct 15, 2019
- Lam Research Corporation
- Mirzafer Abatchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of tungsten etching
- Patent number RE47650
- Issue date Oct 15, 2019
- Lam Research Corporation
- Ramkumar Subramanian
Information Patent Grant
System and method for detecting a process point in multi-mode pulse...
- Patent number 10,242,849
- Issue date Mar 26, 2019
- Lam Research Corporation
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer etching in continuous plasma
- Patent number 9,991,128
- Issue date Jun 5, 2018
- Lam Research Corporation
- Zhongkui Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hybrid stair-step etch
- Patent number 9,741,563
- Issue date Aug 22, 2017
- Lam Research Corporation
- Hua Xiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for detecting a process point in multi-mode pulse...
- Patent number 9,640,371
- Issue date May 2, 2017
- Lam Research Corporation
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of tungsten etching
- Patent number 9,230,825
- Issue date Jan 5, 2016
- Lam Research Corporation
- Ramkumar Subramanian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon nitride dry trim without top pulldown
- Patent number 8,431,461
- Issue date Apr 30, 2013
- Lam Research Corporation
- Qinghua Zhong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for multi-layer resist plasma etch
- Patent number 7,361,607
- Issue date Apr 22, 2008
- Lam Research Corporation
- Yoko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable temperature processes for tunable electrostatic chuck
- Patent number 6,921,724
- Issue date Jul 26, 2005
- Lam Research Corporation
- Tom A. Kamp
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...
- Publication number 20220301853
- Publication date Sep 22, 2022
- LAM RESEARCH CORPORATION
- Wenchi LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECTIONAL DEPOSITION IN ETCH CHAMBER
- Publication number 20220028697
- Publication date Jan 27, 2022
- LAM RESEARCH CORPORATION
- Zhongkui Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU INVERSE MASK PATTERNING
- Publication number 20210020441
- Publication date Jan 21, 2021
- LAM RESEARCH CORPORATION
- Juan VALDIVIA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TRANSFERRING A PATTERN FROM AN ORGANIC MASK
- Publication number 20190378725
- Publication date Dec 12, 2019
- LAM RESEARCH CORPORATION
- Mirzafer ABATCHEV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPACER PROFILE CONTROL USING ATOMIC LAYER DEPOSITION IN A MULTIPLE...
- Publication number 20190237330
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Mirzafer Abatchev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SQUARE SPACERS
- Publication number 20190189447
- Publication date Jun 20, 2019
- LAM RESEARCH CORPORATION
- Tom KAMP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER ETCHING IN CONTINUOUS PLASMA
- Publication number 20170229311
- Publication date Aug 10, 2017
- LAM RESEARCH CORPORATION
- Zhongkui Tan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYBRID STAIR-STEP ETCH
- Publication number 20170213723
- Publication date Jul 27, 2017
- LAM RESEARCH CORPORATION
- Hua XIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DETECTING A PROCESS POINT IN MULT-MODE PULSE...
- Publication number 20170207070
- Publication date Jul 20, 2017
- LAM RESEARCH CORPORATION
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING FIELD NON-UNIFORMITIES OF A WAFER...
- Publication number 20160370796
- Publication date Dec 22, 2016
- LAM RESEARCH CORPORATION
- Marcus Musselman
- G05 - CONTROLLING REGULATING
Information Patent Application
System and Method for Detecting a Process Point in Multi-Mode Pulse...
- Publication number 20160111261
- Publication date Apr 21, 2016
- LAM RESEARCH CORPORATION
- Yassine Kabouzi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF TUNGSTEN ETCHING
- Publication number 20140120727
- Publication date May 1, 2014
- Ramkumar SUBRAMANIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MULTI-LAYER RESIST PLASMA ETCH
- Publication number 20080038927
- Publication date Feb 14, 2008
- Yoko Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Variable temperature processes for tunable electrostatic chuck
- Publication number 20030186545
- Publication date Oct 2, 2003
- Lam Research Corporation, a Delaware Corporation
- Tom A. Kamp
- H01 - BASIC ELECTRIC ELEMENTS

Yoko Yamaguchi

Person

Patents Grantslast 30 patents

Directional deposition in etch chamber

System and method for determining field non-uniformities of a wafer...

Spacer profile control using atomic layer deposition in a multiple...

Method of tungsten etching

System and method for detecting a process point in multi-mode pulse...

Atomic layer etching in continuous plasma

Hybrid stair-step etch

System and method for detecting a process point in multi-mode pulse...

Method of tungsten etching

Silicon nitride dry trim without top pulldown

Method for multi-layer resist plasma etch

Variable temperature processes for tunable electrostatic chuck

Patents Applicationslast 30 patents

METHOD FOR ETCHING FEATURES USING A TARGETED DEPOSITION FOR SELECTI...

DIRECTIONAL DEPOSITION IN ETCH CHAMBER

IN SITU INVERSE MASK PATTERNING

METHOD FOR TRANSFERRING A PATTERN FROM AN ORGANIC MASK

SPACER PROFILE CONTROL USING ATOMIC LAYER DEPOSITION IN A MULTIPLE...

METHOD FOR FORMING SQUARE SPACERS

ATOMIC LAYER ETCHING IN CONTINUOUS PLASMA

HYBRID STAIR-STEP ETCH

SYSTEM AND METHOD FOR DETECTING A PROCESS POINT IN MULT-MODE PULSE...

SYSTEM AND METHOD FOR DETERMINING FIELD NON-UNIFORMITIES OF A WAFER...

System and Method for Detecting a Process Point in Multi-Mode Pulse...

METHOD OF TUNGSTEN ETCHING

METHOD FOR MULTI-LAYER RESIST PLASMA ETCH

Variable temperature processes for tunable electrostatic chuck