Yonatan Vaknin

Person

Migdal Ha'emek, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Single grab overlay measurement of tall targets
- Patent number 12,066,322
- Issue date Aug 20, 2024
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Grant
Imaging overlay with mutually coherent oblique illumination
- Patent number 12,032,300
- Issue date Jul 9, 2024
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Enhancing performance of overlay metrology
- Patent number 12,001,148
- Issue date Jun 4, 2024
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Multi-directional overlay metrology using multiple illumination par...
- Patent number 11,800,212
- Issue date Oct 24, 2023
- KLA Corporation
- Yonatan Vaknin
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Enhancing performance of overlay metrology
- Patent number 11,592,755
- Issue date Feb 28, 2023
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
SPECTRAL ANGULAR METROLOGY
- Publication number 20250076208
- Publication date Mar 6, 2025
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
GRATING-OVER-GRATING OVERLAY MEASUREMENT WITH PARALLEL COLOR PER LAYER
- Publication number 20240427252
- Publication date Dec 26, 2024
- KLA Corporation
- Amnon Manassen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING...
- Publication number 20240337952
- Publication date Oct 10, 2024
- KLA Corporation
- Itay Gdor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION
- Publication number 20240329543
- Publication date Oct 3, 2024
- KLA Corporation
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Application
SINGLE GRAB OVERLAY MEASUREMENT OF TALL TARGETS
- Publication number 20240159585
- Publication date May 16, 2024
- KLA Corporation
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
- Publication number 20230400780
- Publication date Dec 14, 2023
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MULTI-DIRECTIONAL OVERLAY METROLOGY USING MULTIPLE ILLUMINATION PAR...
- Publication number 20230328351
- Publication date Oct 12, 2023
- Yonatan Vaknin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SCANNING SCATTEROMETRY OVERLAY METROLOGY
- Publication number 20230314319
- Publication date Oct 5, 2023
- Amnon Manassen
- G01 - MEASURING TESTING
Information Patent Application
IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION
- Publication number 20230259040
- Publication date Aug 17, 2023
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBLIQUE ILLUMINATION FOR OVERLAY METROLOGY
- Publication number 20220357674
- Publication date Nov 10, 2022
- Andrew V. Hill
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
- Publication number 20220317577
- Publication date Oct 6, 2022
- KLA Corporation
- Amnon Manassen
- G02 - OPTICS

Yonatan Vaknin

Person

Patents Grantslast 30 patents

Single grab overlay measurement of tall targets

Imaging overlay with mutually coherent oblique illumination

Enhancing performance of overlay metrology

Multi-directional overlay metrology using multiple illumination par...

Enhancing performance of overlay metrology

Patents Applicationslast 30 patents

SPECTRAL ANGULAR METROLOGY

GRATING-OVER-GRATING OVERLAY MEASUREMENT WITH PARALLEL COLOR PER LAYER

SYSTEM AND METHOD FOR DETERMINING OVERLAY MEASUREMENT OF A SCANNING...

IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION

SINGLE GRAB OVERLAY MEASUREMENT OF TALL TARGETS

ENHANCING PERFORMANCE OF OVERLAY METROLOGY

MULTI-DIRECTIONAL OVERLAY METROLOGY USING MULTIPLE ILLUMINATION PAR...

SCANNING SCATTEROMETRY OVERLAY METROLOGY

IMAGING OVERLAY WITH MUTUALLY COHERENT OBLIQUE ILLUMINATION

OBLIQUE ILLUMINATION FOR OVERLAY METROLOGY

ENHANCING PERFORMANCE OF OVERLAY METROLOGY