Yoneta Tanaka

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plain surface stage apparatus
- Patent number 6,998,738
- Issue date Feb 14, 2006
- Ushio Denki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure device capable of aligning while moving mask
- Patent number 6,525,804
- Issue date Feb 25, 2003
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Contact exposure process and device
- Patent number 6,232,023
- Issue date May 15, 2001
- Ushiodenki Kabushiki Kaisah
- Toshiyuki Matsuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for pattern searching and a device for positioning of a mas...
- Patent number 6,072,915
- Issue date Jun 6, 2000
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Proximity printing device with variable irradiation angle
- Patent number 6,046,793
- Issue date Apr 4, 2000
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for positioning of a mask relative to another mask, or mask...
- Patent number 5,940,528
- Issue date Aug 17, 1999
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polarized light irradiation device for purposes of optical alignmen...
- Patent number 5,934,780
- Issue date Aug 10, 1999
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G02 - OPTICS
Information Patent Grant
Process for the positioning of a mask relative to a workpiece and d...
- Patent number 5,881,165
- Issue date Mar 9, 1999
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for projection exposure of a workpiece with back alignment...
- Patent number 5,874,190
- Issue date Feb 23, 1999
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for positioning a mask relative to a workpiece and device f...
- Patent number 5,777,747
- Issue date Jul 7, 1998
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process and device for adjusting the distance between a workpiece a...
- Patent number 5,543,890
- Issue date Aug 6, 1996
- Ushiodenki Kabushiki Kaisha
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Plain surface stage apparatus
- Publication number 20040080735
- Publication date Apr 29, 2004
- Yoneta Tanaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yoneta Tanaka

Person

Patents Grantslast 30 patents

Plain surface stage apparatus

Exposure device capable of aligning while moving mask

Contact exposure process and device

Process for pattern searching and a device for positioning of a mas...

Proximity printing device with variable irradiation angle

Process for positioning of a mask relative to another mask, or mask...

Polarized light irradiation device for purposes of optical alignmen...

Process for the positioning of a mask relative to a workpiece and d...

Process for projection exposure of a workpiece with back alignment...

Process for positioning a mask relative to a workpiece and device f...

Process and device for adjusting the distance between a workpiece a...

Patents Applicationslast 30 patents

Plain surface stage apparatus