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Hwaseong-si, KR
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing chamber, substrate processing system including...
Patent number
12,191,190
Issue date
Jan 7, 2025
Samsung Electronics Co., Ltd.
Yongmyung Jun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for treating a substrate
Patent number
10,361,100
Issue date
Jul 23, 2019
Samsung Electronics Co., Ltd.
Hyosan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method and fluid supply system for treating substrate
Patent number
9,941,110
Issue date
Apr 10, 2018
Samsung Electronics Co., Ltd.
Jung-Min Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for purifying cleaning agent
Patent number
9,934,959
Issue date
Apr 3, 2018
Samsung Electronics Co., Ltd.
Yong-Jhin Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
9,627,233
Issue date
Apr 18, 2017
Samsung Electronics Co., Ltd.
SeokHoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for treating a substrate
Patent number
9,534,839
Issue date
Jan 3, 2017
Samsung Electronics Co., Ltd.
Hyosan Lee
F26 - DRYING
Information
Patent Grant
Manufacturing method and fluid supply system for treating substrate
Patent number
9,524,864
Issue date
Dec 20, 2016
Samsung Electronics Co., Ltd.
Jung-Min Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment systems using supercritical fluid
Patent number
9,027,576
Issue date
May 12, 2015
Samsung Electronics Co., Ltd.
Yong-Jhin Cho
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUPERCRITICAL FLUID PROCESSING APPARATUS AND SUBSTRATE PROCESSING S...
Publication number
20230046595
Publication date
Feb 16, 2023
Samsung Electronics Co., Ltd.
Seohyun KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
Publication number
20230043451
Publication date
Feb 9, 2023
Samsung Electronics Co., Ltd.
Yongmyung JUN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus and Methods for Treating a Substrate
Publication number
20170084469
Publication date
Mar 23, 2017
Samsung Electronics Co., Ltd.
Hyosan Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD AND FLUID SUPPLY SYSTEM FOR TREATING SUBSTRATE
Publication number
20170062208
Publication date
Mar 2, 2017
Samsung Electronics Co., Ltd.
Jung-Min Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT APPARATUS INCLUDING SEALING MEMBER HAVING ATYPI...
Publication number
20150303036
Publication date
Oct 22, 2015
SEMES CO., LTD.
Jihoon JEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PURIFYING CLEANING AGENT
Publication number
20150157955
Publication date
Jun 11, 2015
Samsung Electronics Co., Ltd.
Yong-Jhin CHO
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20140373881
Publication date
Dec 25, 2014
Samsung Electronics Co., Ltd.
Jung-Min OH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATING APPARATUS
Publication number
20140360041
Publication date
Dec 11, 2014
Samsung Electronics Co., Ltd.
Jihoon JEONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Substrate Treating Apparatus
Publication number
20140291421
Publication date
Oct 2, 2014
Samsung Electronics Co., Ltd.
SeokHoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT SYSTEMS USING SUPERCRITICAL FLUID
Publication number
20140262024
Publication date
Sep 18, 2014
Yong-Jhin CHO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD AND FLUID SUPPLY SYSTEM FOR TREATING SUBSTRATE
Publication number
20130199051
Publication date
Aug 8, 2013
Samsung Electronics Co., Ltd.
Jung-Min Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR TREATING A SUBSTRATE
Publication number
20130145640
Publication date
Jun 13, 2013
Hyosan Lee
H01 - BASIC ELECTRIC ELEMENTS