Yoon Ho BAE

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,972,925
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Bong seong Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210358716
- Publication date Nov 18, 2021
- TOKYO ELECTRON LIMITED
- Bongseong KIM
- H01 - BASIC ELECTRIC ELEMENTS