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Yoram Uziel
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Milpitas, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Sensitive optical metrology in scanning and static modes
Patent number
11,933,717
Issue date
Mar 19, 2024
KLA Corporation
Andrew V. Hill
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Massive overlay metrology sampling with multiple measurement columns
Patent number
11,899,375
Issue date
Feb 13, 2024
KLA Corporation
Jonathan Madsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Overlay metrology using spectroscopic phase
Patent number
11,713,959
Issue date
Aug 1, 2023
KLA Corporation
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Grant
In situ process chamber chuck cleaning by cleaning substrate
Patent number
11,638,938
Issue date
May 2, 2023
KLA Corporation
Mor Azaria
B08 - CLEANING
Information
Patent Grant
Systems and methods for chuck cleaning
Patent number
11,607,716
Issue date
Mar 21, 2023
KLA Corporation
Shai Mark
B08 - CLEANING
Information
Patent Grant
On-the-fly scatterometry overlay metrology target
Patent number
11,378,394
Issue date
Jul 5, 2022
KLA Corporation
Yuri Paskover
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS
Publication number
20230359129
Publication date
Nov 9, 2023
Jonathan Madsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTRA TALL TARGET METROLOGY
Publication number
20230324809
Publication date
Oct 12, 2023
Yoram Uziel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SYSTEM AND METHOD FOR ISOLATION OF SPECIFIC FOURIER PUPIL FREQUENCY...
Publication number
20230314344
Publication date
Oct 5, 2023
Yuri Paskover
G01 - MEASURING TESTING
Information
Patent Application
OVERLAY METROLOGY USING SPECTROSCOPIC PHASE
Publication number
20220299308
Publication date
Sep 22, 2022
Andrei V. Shchegrov
G01 - MEASURING TESTING
Information
Patent Application
ON-THE-FLY SCATTEROMETRY OVERLAY METROLOGY TARGET
Publication number
20220187062
Publication date
Jun 16, 2022
KLA Corporation
Yuri Paskover
G01 - MEASURING TESTING
Information
Patent Application
Sensitive Optical Metrology in Scanning and Static Modes
Publication number
20210096061
Publication date
Apr 1, 2021
KLA Corporation
Andrew V. Hill
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
In Situ Process Chamber Chuck Cleaning by Cleaning Substrate
Publication number
20200384509
Publication date
Dec 10, 2020
KLA Corporation
Mor Azaria
B08 - CLEANING