Yoram Uziel

Person

Misgav, IL

People

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for improved metrology for semiconductor device...
- Patent number 12,131,959
- Issue date Oct 29, 2024
- KLA Corporation
- Liran Yerushalmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhancing performance of overlay metrology
- Patent number 12,001,148
- Issue date Jun 4, 2024
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
On-product overlay targets
- Patent number 11,967,535
- Issue date Apr 23, 2024
- KLA Corporation
- Amnon Manassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measurement of properties of patterned photoresist
- Patent number 11,644,419
- Issue date May 9, 2023
- KLA Corporation
- Roie Volkovich
- G01 - MEASURING TESTING
Information Patent Grant
Multi-stage, multi-zone substrate positioning systems
- Patent number 11,637,030
- Issue date Apr 25, 2023
- KLA Corporation
- Yoram Uziel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhancing performance of overlay metrology
- Patent number 11,592,755
- Issue date Feb 28, 2023
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Non-orthogonal target and method for using the same in measuring mi...
- Patent number 11,409,205
- Issue date Aug 9, 2022
- KLA Corporation
- Itay Gdor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated system and method
- Patent number 11,294,164
- Issue date Apr 5, 2022
- Applied Materials Israel Ltd.
- Igor Krivts (Krayvitz)
- G02 - OPTICS
Information Patent Grant
Charged particle beam source and a method for assembling a charged...
- Patent number 11,189,451
- Issue date Nov 30, 2021
- Applied Materials Israel Ltd.
- Itay Asulin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for evaluating objects
- Patent number 11,177,048
- Issue date Nov 16, 2021
- Applied Materials Israel Ltd.
- Igor Krivts (Krayvitz)
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Charged particle beam source and a method for assembling a charged...
- Patent number 10,886,092
- Issue date Jan 5, 2021
- Applied Materials Israel Ltd.
- Itay Asulin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chuck for supporting a wafer
- Patent number 10,446,434
- Issue date Oct 15, 2019
- Applied Materials Israel Ltd.
- Doron Korngut
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for inspecting and reviewing a sample
- Patent number 10,177,048
- Issue date Jan 8, 2019
- Applied Materials Israel Ltd.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning an object using multiple mechanical stages
- Patent number 10,068,748
- Issue date Sep 4, 2018
- Applied Materials Israel Ltd.
- Yoram Uziel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Near-field sensor height control
- Patent number 10,060,736
- Issue date Aug 28, 2018
- Appled Materials Israel Ltd.
- Amir Moshe Sagiv
- G01 - MEASURING TESTING
Information Patent Grant
System and method for forming a sealed chamber
- Patent number 10,056,274
- Issue date Aug 21, 2018
- Applied Materials Israel Ltd.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for moving a substrate
- Patent number 10,049,904
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Ofer Adan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for forming a sealed chamber
- Patent number 9,997,328
- Issue date Jun 12, 2018
- Applied Materials Israel Ltd.
- Michael R. Rice
- G02 - OPTICS
Information Patent Grant
Evaluation system and a method for evaluating a substrate
- Patent number 9,835,563
- Issue date Dec 5, 2017
- Applied Materials Israel Ltd.
- Yoram Uziel
- G01 - MEASURING TESTING
Information Patent Grant
System and method for attaching a mask to a mask holder
- Patent number 9,829,809
- Issue date Nov 28, 2017
- Applied Materials Israel Ltd.
- Israel Avneri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for charging and imaging an object
- Patent number 9,666,412
- Issue date May 30, 2017
- Applied Materials Israel Ltd.
- Alon Litman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slit valve with a pressurized gas bearing
- Patent number 9,587,749
- Issue date Mar 7, 2017
- Applied Materials Israel, Ltd.
- Michael R. Rice
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Chamber elements and a method for placing a chamber at a load position
- Patent number 9,302,358
- Issue date Apr 5, 2016
- Applied Materials Israel, Ltd.
- Igor Krayvitz (Krivts)
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for inspecting a sample using landing lens
- Patent number 9,297,692
- Issue date Mar 29, 2016
- Applied Materials Israel, Ltd.
- Yoram Uziel
- G01 - MEASURING TESTING
Information Patent Grant
High electron energy based overlay error measurement methods and sy...
- Patent number 9,046,475
- Issue date Jun 2, 2015
- Applied Materials Israel, Ltd.
- Moshe Langer
- G01 - MEASURING TESTING
Information Patent Grant
Conductive element for electrically coupling an EUVL mask to a supp...
- Patent number 8,772,737
- Issue date Jul 8, 2014
- Applied Materials Israel, Ltd.
- Igor Krivts (Krayvitz)
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Integrated in situ scanning electronic microscope review station in...
- Patent number 7,428,850
- Issue date Sep 30, 2008
- Applied Materials, Israel,Ltd.
- Ron Naftali
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ module for particle removal from solid-state surfaces
- Patent number 6,949,147
- Issue date Sep 27, 2005
- Oramir Semiconductor Equipment Ltd.
- Yoram Uziel
- B08 - CLEANING
Information Patent Grant
Contaminant removal by laser-accelerated fluid
- Patent number 6,908,567
- Issue date Jun 21, 2005
- Applied Materials Israel, Ltd.
- Yoram Uziel
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Buffer station for wafer backside cleaning and inspection
- Patent number 6,900,135
- Issue date May 31, 2005
- Applied Materials, Inc.
- Sasson R. Somekh
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CALIBRATED MEASUREMENT OF OVERLAY ERROR USING SMALL TARGETS
- Publication number 20240295827
- Publication date Sep 5, 2024
- KLA Corporation
- Yoel Feler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS
- Publication number 20240027919
- Publication date Jan 25, 2024
- KLA Corporation
- Jonathan Madsen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
- Publication number 20230400780
- Publication date Dec 14, 2023
- KLA Corporation
- Amnon Manassen
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
IN-SITU PROCESS CHAMBER CHUCK CLEANING BY CLEANING SUBSTRATE
- Publication number 20230264234
- Publication date Aug 24, 2023
- KLA Corporation
- Mor Azaria
- B08 - CLEANING
Information Patent Application
SYSTEMS AND METHODS FOR ROTATIONAL CALIBRATION OF METROLOGY TOOLS
- Publication number 20230068016
- Publication date Mar 2, 2023
- KLA Corporation
- Alexander Novikov
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVED METROLOGY FOR SEMICONDUCTOR DEVICE...
- Publication number 20220344218
- Publication date Oct 27, 2022
- KLA Corporation
- Liran Yerushalmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ON-PRODUCT OVERLAY TARGETS
- Publication number 20220328365
- Publication date Oct 13, 2022
- KLA Corporation
- Amnon Manassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCING PERFORMANCE OF OVERLAY METROLOGY
- Publication number 20220317577
- Publication date Oct 6, 2022
- KLA Corporation
- Amnon Manassen
- G02 - OPTICS
Information Patent Application
MEASUREMENT OF PROPERTIES OF PATTERNED PHOTORESIST
- Publication number 20220236181
- Publication date Jul 28, 2022
- KLA Corporation
- Roie Volkovich
- G01 - MEASURING TESTING
Information Patent Application
Non-Orthogonal Target and Method for Using the Same in Measuring Mi...
- Publication number 20210364935
- Publication date Nov 25, 2021
- Itay Gdor
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CHARGED PARTICLE BEAM SOURCE AND A METHOD FOR ASSEMBLING A CHARGED...
- Publication number 20210175040
- Publication date Jun 10, 2021
- APPLIED MATERIALS ISRAEL LTD.
- Itay Asulin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR EVALUATING OBJECTS
- Publication number 20210151214
- Publication date May 20, 2021
- APPLIED MATERIALS ISRAEL LTD.
- Igor Krivts (Krayvitz)
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTEGRATED SYSTEM AND METHOD
- Publication number 20210026123
- Publication date Jan 28, 2021
- APPLIED MATERIALS ISRAEL LTD.
- Igor Krivts (Krayvitz)
- G02 - OPTICS
Information Patent Application
Multi-Stage, Multi-Zone Substrate Positioning Systems
- Publication number 20200402827
- Publication date Dec 24, 2020
- KLA Corporation
- Yoram Uziel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SOURCE AND A METHOD FOR ASSEMBLING A CHARGED...
- Publication number 20200234907
- Publication date Jul 23, 2020
- APPLIED MATERIALS ISRAEL LTD.
- Itay Asulin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHUCK FOR SUPPORTING A WAFER
- Publication number 20170309511
- Publication date Oct 26, 2017
- APPLIED MATERIALS ISRAEL LTD.
- Doron Korngut
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING AN OBJECT USING MULTIPLE MECHANICAL STAGES
- Publication number 20170084425
- Publication date Mar 23, 2017
- APPLIED MATERIALS ISRAEL LTD.
- Yoram Uziel
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER
- Publication number 20160268097
- Publication date Sep 15, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Michael R. Rice
- G02 - OPTICS
Information Patent Application
SYSTEM FOR INSPECTING AND REVIEWING A SAMPLE
- Publication number 20160260642
- Publication date Sep 8, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER
- Publication number 20160163570
- Publication date Jun 9, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ATTACHING A MASK TO A MASK HOLDER
- Publication number 20160161869
- Publication date Jun 9, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Israel Avneri
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EVALUATION SYSTEM AND A METHOD FOR EVALUATING A SUBSTRATE
- Publication number 20160077016
- Publication date Mar 17, 2016
- APPLIED MATERIALS ISRAEL LTD.
- Yoram Uziel
- G01 - MEASURING TESTING
Information Patent Application
SLIT VALVE WITH A PRESSURIZED GAS BEARING
- Publication number 20150075659
- Publication date Mar 19, 2015
- APPLIED MATERIALS ISRAEL, LTD.
- Michael R. Rice
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
SYSTEM AND METHOD FOR INSPECTING A SAMPLE USING LANDING LENS
- Publication number 20140231632
- Publication date Aug 21, 2014
- APPLIED MATERIALS ISRAEL, LTD.
- Yoram Uziel
- G02 - OPTICS
Information Patent Application
CHAMBER ELEMENTS AND A METHOD FOR PLACING A CHAMBER AT A LOAD POSITION
- Publication number 20140027968
- Publication date Jan 30, 2014
- Igor Krayvitz (Krivts)
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE ELEMENT FOR ELECTRICALLY COUPLING AN EUVL MASK TO A SUPP...
- Publication number 20130075605
- Publication date Mar 28, 2013
- APPLIED MATERIALS ISRAEL, LTD.
- Igor Krivts (Krayvitz)
- G01 - MEASURING TESTING
Information Patent Application
HIGH ELECTRON ENERGY BASED OVERLAY ERROR MEASUREMENT METHODS AND SY...
- Publication number 20120292502
- Publication date Nov 22, 2012
- Moshe Langer
- G01 - MEASURING TESTING
Information Patent Application
Integrated in situ scanning electronic microscope review station in...
- Publication number 20070022831
- Publication date Feb 1, 2007
- Ron Naftali
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Manufacture of ultra-clean surfaces by selective
- Publication number 20060060213
- Publication date Mar 23, 2006
- Walter Huber
- B08 - CLEANING
Information Patent Application
In Situ module for particle removal from solid-state surfaces
- Publication number 20050000540
- Publication date Jan 6, 2005
- Oramir Semiconductor Equipment Ltd.
- Yoram Uziel
- B08 - CLEANING

Yoram Uziel

Person

Patents Grantslast 30 patents

Systems and methods for improved metrology for semiconductor device...

Enhancing performance of overlay metrology

On-product overlay targets

Measurement of properties of patterned photoresist

Multi-stage, multi-zone substrate positioning systems

Enhancing performance of overlay metrology

Non-orthogonal target and method for using the same in measuring mi...

Integrated system and method

Charged particle beam source and a method for assembling a charged...

Method and system for evaluating objects

Charged particle beam source and a method for assembling a charged...

Chuck for supporting a wafer

System for inspecting and reviewing a sample

Scanning an object using multiple mechanical stages

Near-field sensor height control

System and method for forming a sealed chamber

Method and system for moving a substrate

System and method for forming a sealed chamber

Evaluation system and a method for evaluating a substrate

System and method for attaching a mask to a mask holder

Method for charging and imaging an object

Slit valve with a pressurized gas bearing

Chamber elements and a method for placing a chamber at a load position

System and method for inspecting a sample using landing lens

High electron energy based overlay error measurement methods and sy...

Conductive element for electrically coupling an EUVL mask to a supp...

Integrated in situ scanning electronic microscope review station in...

In situ module for particle removal from solid-state surfaces

Contaminant removal by laser-accelerated fluid

Buffer station for wafer backside cleaning and inspection

Patents Applicationslast 30 patents

CALIBRATED MEASUREMENT OF OVERLAY ERROR USING SMALL TARGETS

MASSIVE OVERLAY METROLOGY SAMPLING WITH MULTIPLE MEASUREMENT COLUMNS

ENHANCING PERFORMANCE OF OVERLAY METROLOGY

IN-SITU PROCESS CHAMBER CHUCK CLEANING BY CLEANING SUBSTRATE

SYSTEMS AND METHODS FOR ROTATIONAL CALIBRATION OF METROLOGY TOOLS

SYSTEMS AND METHODS FOR IMPROVED METROLOGY FOR SEMICONDUCTOR DEVICE...

ON-PRODUCT OVERLAY TARGETS

ENHANCING PERFORMANCE OF OVERLAY METROLOGY

MEASUREMENT OF PROPERTIES OF PATTERNED PHOTORESIST

Non-Orthogonal Target and Method for Using the Same in Measuring Mi...

CHARGED PARTICLE BEAM SOURCE AND A METHOD FOR ASSEMBLING A CHARGED...

METHOD AND SYSTEM FOR EVALUATING OBJECTS

INTEGRATED SYSTEM AND METHOD

Multi-Stage, Multi-Zone Substrate Positioning Systems

CHARGED PARTICLE BEAM SOURCE AND A METHOD FOR ASSEMBLING A CHARGED...

CHUCK FOR SUPPORTING A WAFER

SCANNING AN OBJECT USING MULTIPLE MECHANICAL STAGES

SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER

SYSTEM FOR INSPECTING AND REVIEWING A SAMPLE

SYSTEM AND METHOD FOR FORMING A SEALED CHAMBER

SYSTEM AND METHOD FOR ATTACHING A MASK TO A MASK HOLDER

EVALUATION SYSTEM AND A METHOD FOR EVALUATING A SUBSTRATE

SLIT VALVE WITH A PRESSURIZED GAS BEARING

SYSTEM AND METHOD FOR INSPECTING A SAMPLE USING LANDING LENS

CHAMBER ELEMENTS AND A METHOD FOR PLACING A CHAMBER AT A LOAD POSITION

CONDUCTIVE ELEMENT FOR ELECTRICALLY COUPLING AN EUVL MASK TO A SUPP...

HIGH ELECTRON ENERGY BASED OVERLAY ERROR MEASUREMENT METHODS AND SY...

Integrated in situ scanning electronic microscope review station in...

Manufacture of ultra-clean surfaces by selective

In Situ module for particle removal from solid-state surfaces