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Yoshiaki Inda
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Tokyo, JP
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last 30 patents
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Patent Grant
Ion implantation apparatus and control method thereof
Patent number
8,692,216
Issue date
Apr 8, 2014
Sen Corporation
Hiroyuki Kariya
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
ION IMPLANTATION APPARATUS AND CONTROL METHOD THEREOF
Publication number
20130256566
Publication date
Oct 3, 2013
SEN Corporation
Hiroyuki KARIYA
H01 - BASIC ELECTRIC ELEMENTS