Yoshiaki Kohama

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Object observation apparatus and object observation
- Patent number RE41665
- Issue date Sep 14, 2010
- Nikon Corporation
- Muneki Hamashima
- 250 - Radiant energy
Information Patent Grant
Electron beam apparatus and device production method using the elec...
- Patent number 7,439,502
- Issue date Oct 21, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Object observation apparatus and object observation
- Patent number RE40221
- Issue date Apr 8, 2008
- Nikon Corporation
- Muneki Hamashima
- 250 - Radiant energy
Information Patent Grant
Electron beam apparatus and device fabrication method using the ele...
- Patent number 7,244,932
- Issue date Jul 17, 2007
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam apparatus, and inspection instrument and inspection p...
- Patent number 6,958,477
- Issue date Oct 25, 2005
- Nikon Corporation
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Grant
Scanning device and method including electric charge movement
- Patent number 6,953,944
- Issue date Oct 11, 2005
- Nikon Corporation
- Yoshiaki Kohama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus, and inspection instrument and inspection p...
- Patent number 6,677,587
- Issue date Jan 13, 2004
- Nikon Corporation
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Grant
Scanning device and scanning method
- Patent number 6,670,602
- Issue date Dec 30, 2003
- Nikon Corporation
- Yoshiaki Kohama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus, and inspection instrument and inspection p...
- Patent number 6,518,582
- Issue date Feb 11, 2003
- Nikon Corporation
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Grant
Object observation apparatus and object observation
- Patent number 6,479,819
- Issue date Nov 12, 2002
- Nikon Corporation
- Muneki Hamashima
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for inspecting predetermined region on surface...
- Patent number 6,184,526
- Issue date Feb 6, 2001
- Nikon Corporation
- Yoshiaki Kohama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 5,780,853
- Issue date Jul 14, 1998
- Nikon Corporation
- Futoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 5,646,403
- Issue date Jul 8, 1997
- Nikon Corporation
- Futoshi Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle microscope
- Patent number 5,466,936
- Issue date Nov 14, 1995
- Nikon Corporation
- Yoshiaki Kohama
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20080173815
- Publication date Jul 24, 2008
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20070272859
- Publication date Nov 29, 2007
- EBARA CORPORATION
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus, and inspection instrument and inspection p...
- Publication number 20070034797
- Publication date Feb 15, 2007
- Nikon Corporation
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus, and inspection instrument and inspection p...
- Publication number 20060022138
- Publication date Feb 2, 2006
- Nikon Corporation
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Application
Scanning device and method including electric charge movement
- Publication number 20040238740
- Publication date Dec 2, 2004
- Nikon Corporation
- Yoshiaki Kohama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam apparatus, and inspection instrument and inspection p...
- Publication number 20040106862
- Publication date Jun 3, 2004
- Nikon Corporation
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus, and inspection instrument and inspection p...
- Publication number 20030085355
- Publication date May 8, 2003
- NIKON CORPORATION
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Application
Charged particle beam apparatus
- Publication number 20020158198
- Publication date Oct 31, 2002
- NIKON CORPORATION
- Yoshiaki Kohama
- G01 - MEASURING TESTING
Information Patent Application
Electron beam apparatus and device production method using the elec...
- Publication number 20020148961
- Publication date Oct 17, 2002
- Mamoru Nakasuji
- G01 - MEASURING TESTING

Yoshiaki Kohama

Person

Patents Grantslast 30 patents

Object observation apparatus and object observation

Electron beam apparatus and device production method using the elec...

Object observation apparatus and object observation

Electron beam apparatus and device fabrication method using the ele...

Electron beam apparatus, and inspection instrument and inspection p...

Scanning device and method including electric charge movement

Electron beam apparatus, and inspection instrument and inspection p...

Scanning device and scanning method

Electron beam apparatus, and inspection instrument and inspection p...

Object observation apparatus and object observation

Apparatus and method for inspecting predetermined region on surface...

Scanning electron microscope

Scanning electron microscope

Charged particle microscope

Patents Applicationslast 30 patents

Electron beam apparatus and device production method using the elec...

Electron beam apparatus and device production method using the elec...

Electron beam apparatus, and inspection instrument and inspection p...

Electron beam apparatus, and inspection instrument and inspection p...

Scanning device and method including electric charge movement

Electron beam apparatus, and inspection instrument and inspection p...

Electron beam apparatus, and inspection instrument and inspection p...

Charged particle beam apparatus

Electron beam apparatus and device production method using the elec...