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ELECTROSTATIC CHUCK DEVICE
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Publication date Oct 25, 2018
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Publication number 20160036355
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Publication date Feb 4, 2016
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ELECTROSTATIC CHUCKING DEVICE
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Publication number 20140204501
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Publication date Jul 24, 2014
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ELECTROSTATIC CHUCK APPARATUS
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Publication number 20130265690
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Publication date Oct 10, 2013
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H01 - BASIC ELECTRIC ELEMENTS
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ELECTROSTATIC CHUCK APPARATUS
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Publication number 20120299253
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Publication date Nov 29, 2012
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SUMITOMO OSAKA CEMENT CO., LTD.
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H01 - BASIC ELECTRIC ELEMENTS
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