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Yoshiaki Namioka
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Toyama, JP
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last 30 patents
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Patent Application
Clean room, local cleaning system, methods of use thereof, and clea...
Publication number
20060045669
Publication date
Mar 2, 2006
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Yoshiaki Namioka
F24 - HEATING RANGES VENTILATING
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Patent Application
Method for cleaning semiconductor wafers
Publication number
20050139230
Publication date
Jun 30, 2005
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Tsuyoshi Miyata
B08 - CLEANING