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Yoshiaki Onimaru
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Numazu-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Data processing method, data processing apparatus, and multiple cha...
Patent number
10,886,103
Issue date
Jan 5, 2021
NuFlare Technology, Inc.
Kei Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Drawing device and drawing method
Patent number
10,475,621
Issue date
Nov 12, 2019
NuFlare Technology, Inc.
Kei Hasegawa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-charged particle beam writing apparatus and multi-charged par...
Patent number
9,953,800
Issue date
Apr 24, 2018
NuFlare Technology, Inc.
Kei Hasegawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged beam drawing apparatus and charged beam drawing method
Patent number
7,476,881
Issue date
Jan 13, 2009
Nuflare Technology, Inc.
Kiyoshi Hattori
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DATA PROCESSING METHOD, DATA PROCESSING APPARATUS, AND MULTIPLE CHA...
Publication number
20190378688
Publication date
Dec 12, 2019
NuFlare Technology, Inc.
Kei HASEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DRAWING DEVICE AND DRAWING METHOD
Publication number
20180350560
Publication date
Dec 6, 2018
NuFlare Technology, Inc.
Kei HASEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED PAR...
Publication number
20160322196
Publication date
Nov 3, 2016
NuFlare Technology, Inc.
Kei HASEGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED BEAM DRAWING APPARATUS AND CHARGED BEAM DRAWING METHOD
Publication number
20070114461
Publication date
May 24, 2007
Kiyoshi HATTORI
B82 - NANO-TECHNOLOGY