Yoshiaki Sasaki

Person

Yamanashi-Ken, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of transferring substrate
- Patent number 10,720,356
- Issue date Jul 21, 2020
- Tokyo Electron Limited
- Keiichi Nagakubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooling mechanism and processing system
- Patent number 10,256,128
- Issue date Apr 9, 2019
- Tokyo Electron Limited
- Keita Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for positioning a transfer unit, method for calculating posi...
- Patent number 9,541,920
- Issue date Jan 10, 2017
- Tokyo Electron Limited
- Masato Kubodera
- G05 - CONTROLLING REGULATING
Information Patent Grant
Film position adjusting method, memory medium and substrate process...
- Patent number 8,318,238
- Issue date Nov 27, 2012
- Tokyo Electron Limited
- Yoshiaki Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Port structure in semiconductor processing system
- Patent number 7,279,067
- Issue date Oct 9, 2007
- Tokyo Electron Limited
- Tetsuo Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mounting/demounting device for wafer carrier lid
- Patent number 6,984,097
- Issue date Jan 10, 2006
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for aligning conveying position of object processing system,...
- Patent number 6,742,980
- Issue date Jun 1, 2004
- Tokyo Electron Limited
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for attaching target substrate transfer container to semicon...
- Patent number 6,676,356
- Issue date Jan 13, 2004
- Tokyo Electron Limited
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cart for mounting/demounting wafer transfer robot
- Patent number 6,579,056
- Issue date Jun 17, 2003
- Tokyo Electron Limited
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 6,328,864
- Issue date Dec 11, 2001
- Tokyo Electron Limited
- Shigeru Ishizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Controlling gas in a multichamber processing system
- Patent number 6,224,679
- Issue date May 1, 2001
- Tokyo Electron Limited
- Yoshiaki Sasaki
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200344850
- Publication date Oct 29, 2020
- TOKYO ELECTRON LIMITED
- Hirofumi YAMAGUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...
- Publication number 20190096702
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Toshimitsu SAKAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE
- Publication number 20180082881
- Publication date Mar 22, 2018
- TOKYO ELECTRON LIMITED
- Keiichi NAGAKUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEAKAGE DETERMINING METHOD, SUBSTRATE PROCESSING APPARATUS AND STOR...
- Publication number 20160169766
- Publication date Jun 16, 2016
- Seiji ISHIBASHI
- G01 - MEASURING TESTING
Information Patent Application
COOLING MECHANISM AND PROCESSING SYSTEM
- Publication number 20150133044
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Keita Kumagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSI...
- Publication number 20140107825
- Publication date Apr 17, 2014
- TOKYO ELECTRON LIMITED
- Masato KUBODERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD-LOCK APPARATUS AND SUBSTRATE COOLING METHOD
- Publication number 20100326637
- Publication date Dec 30, 2010
- TOKYO ELECTRON LIMITED
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM POSITION ADJUSTING METHOD, MEMORY MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20090087542
- Publication date Apr 2, 2009
- TOKYO ELECTRON LIMITED
- Yoshiaki Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20060219171
- Publication date Oct 5, 2006
- TOKYO ELECTRON LIMITED
- Yoshiaki Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Port structure in semiconductor processing system
- Publication number 20050103270
- Publication date May 19, 2005
- TOKYO ELECTRON LIMITED
- Tetsuo Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for aligning conveying position of object processing system,...
- Publication number 20020136629
- Publication date Sep 26, 2002
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device for attaching target substrate transfer container to semicon...
- Publication number 20020051701
- Publication date May 2, 2002
- Hiroaki Saeki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor processing system and transfer apparatus for the same
- Publication number 20020006323
- Publication date Jan 17, 2002
- Tetsuo Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cart for mounting/demounting wafer transfer robot
- Publication number 20010048871
- Publication date Dec 6, 2001
- Yoshiaki Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Yoshiaki Sasaki

Person

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Substrate processing apparatus and method of transferring substrate

Cooling mechanism and processing system

Method for positioning a transfer unit, method for calculating posi...

Film position adjusting method, memory medium and substrate process...

Port structure in semiconductor processing system

Mounting/demounting device for wafer carrier lid

Method for aligning conveying position of object processing system,...

Device for attaching target substrate transfer container to semicon...

Cart for mounting/demounting wafer transfer robot

Vacuum processing apparatus

Controlling gas in a multichamber processing system

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE

LEAKAGE DETERMINING METHOD, SUBSTRATE PROCESSING APPARATUS AND STOR...

COOLING MECHANISM AND PROCESSING SYSTEM

METHOD FOR POSITIONING A TRANSFER UNIT, METHOD FOR CALCULATING POSI...

LOAD-LOCK APPARATUS AND SUBSTRATE COOLING METHOD

FILM POSITION ADJUSTING METHOD, MEMORY MEDIUM AND SUBSTRATE PROCESS...

Substrate processing apparatus

Port structure in semiconductor processing system

Method for aligning conveying position of object processing system,...

Device for attaching target substrate transfer container to semicon...

Semiconductor processing system and transfer apparatus for the same

Cart for mounting/demounting wafer transfer robot