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Yoshibumi Suzuki
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Kanagawa-Ken, JP
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last 30 patents
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Patent Grant
Polishing method to reduce dishing of tungsten on a dielectric
Patent number
7,316,976
Issue date
Jan 8, 2008
DuPont Air Products Nanomaterials LLC
Haruki Nojo
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
Polishing method to reduce dishing of tungsten on a dielectric
Publication number
20050258139
Publication date
Nov 24, 2005
Haruki Nojo
B24 - GRINDING POLISHING