Yoshichika Tokuno

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Fukuoka-Ken, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method, storage medium and substrate processin...
- Patent number 8,133,327
- Issue date Mar 13, 2012
- Tokyo Electron Limited
- Yoshichika Tokuno
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ozone processing apparatus and ozone processing method
- Patent number 7,767,006
- Issue date Aug 3, 2010
- Tokyo Electron Limited
- Yoshichika Tokuno
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Substrate Processing Method, Storage Medium and Substrate Processin...
- Publication number 20090014033
- Publication date Jan 15, 2009
- Yoshichika Tokuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ozone processing apparatus and ozone processing method
- Publication number 20070107751
- Publication date May 17, 2007
- TOKYO ELECTRON LIMITED
- Yoshichika Tokuno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL