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Yoshie OZAWA
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Nirasaki City, JP
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last 30 patents
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Patent Grant
Etching method
Patent number
11,127,597
Issue date
Sep 21, 2021
Tokyo Electron Limited
Reiko Sasahara
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
ETCHING METHOD
Publication number
20200111674
Publication date
Apr 9, 2020
TOKYO ELECTRON LIMITED
Reiko SASAHARA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20190378724
Publication date
Dec 12, 2019
TOKYO ELECTRON LIMITED
Satoshi TODA
H01 - BASIC ELECTRIC ELEMENTS