Yoshie OZAWA

Person

  • Nirasaki City, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Etching method

    • Patent number 11,127,597
    • Issue date Sep 21, 2021
    • Tokyo Electron Limited
    • Reiko Sasahara
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ETCHING METHOD

    • Publication number 20200111674
    • Publication date Apr 9, 2020
    • TOKYO ELECTRON LIMITED
    • Reiko SASAHARA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD AND ETCHING APPARATUS

    • Publication number 20190378724
    • Publication date Dec 12, 2019
    • TOKYO ELECTRON LIMITED
    • Satoshi TODA
    • H01 - BASIC ELECTRIC ELEMENTS