Yoshie Tanaka

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Kudamatsu, JP

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Patents Grantslast 30 patents

Information Patent Grant
Sample treating method and apparatus
- Patent number 4,985,113
- Issue date Jan 15, 1991
- Hitachi, Ltd.
- Kotaro Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for monitoring etching
- Patent number 4,609,426
- Issue date Sep 2, 1986
- Hitachi, Ltd.
- Yoshifumi Ogawa
- G01 - MEASURING TESTING